2/24/2012	7:33:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	7:33:24 AM	Recipe started at 7:33 AM
2/24/2012	7:33:24 AM	Helium valve closed
2/24/2012	7:33:24 AM	H2 valve closed
2/24/2012	7:33:24 AM	BCl3 valve closed
2/24/2012	7:33:24 AM	PH3 valve closed
2/24/2012	7:33:24 AM	SiCl4 pre valve closed
2/24/2012	7:33:24 AM	SiCl4 post valve closed
2/24/2012	7:33:24 AM	Main Vac valve closed
2/24/2012	7:33:24 AM	Bypass valve closed
2/24/2012	7:33:24 AM	Bubbler valve closed
2/24/2012	7:33:24 AM	Helium MFC set to  0.000000
2/24/2012	7:33:24 AM	H2 MFC set to  0.000000
2/24/2012	7:33:24 AM	BCl3 MFC set to  0.000000
2/24/2012	7:33:24 AM	PH3 MFC set to  0.000000
2/24/2012	7:33:24 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:33:24 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:33:25 AM	Tube furnace set to 0
2/24/2012	7:33:28 AM	H2 valve closed
2/24/2012	7:33:28 AM	BCl3 valve closed
2/24/2012	7:33:28 AM	PH3 valve closed
2/24/2012	7:33:28 AM	SiCl4 pre valve closed
2/24/2012	7:33:28 AM	SiCl4 post valve closed
2/24/2012	7:33:28 AM	Main Vac valve closed
2/24/2012	7:33:28 AM	Bypass valve closed
2/24/2012	7:33:28 AM	Bubbler valve closed
2/24/2012	7:33:28 AM	Helium valve opened
2/24/2012	7:33:28 AM	Helium MFC set to  500.000000
2/24/2012	7:33:28 AM	H2 MFC set to  0.000000
2/24/2012	7:33:28 AM	BCl3 MFC set to  0.000000
2/24/2012	7:33:28 AM	PH3 MFC set to  0.000000
2/24/2012	7:33:28 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:33:28 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:33:28 AM	Tube furnace set to 0
2/24/2012	7:34:33 AM	Helium valve closed
2/24/2012	7:34:33 AM	H2 valve closed
2/24/2012	7:34:33 AM	BCl3 valve closed
2/24/2012	7:34:33 AM	PH3 valve closed
2/24/2012	7:34:33 AM	SiCl4 pre valve closed
2/24/2012	7:34:33 AM	SiCl4 post valve closed
2/24/2012	7:34:33 AM	Main Vac valve closed
2/24/2012	7:34:33 AM	Bypass valve closed
2/24/2012	7:34:33 AM	Bubbler valve closed
2/24/2012	7:34:33 AM	Helium MFC set to  0.000000
2/24/2012	7:34:33 AM	H2 MFC set to  0.000000
2/24/2012	7:34:33 AM	BCl3 MFC set to  0.000000
2/24/2012	7:34:33 AM	PH3 MFC set to  0.000000
2/24/2012	7:34:33 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:34:33 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:34:33 AM	Tube furnace set to 0
2/24/2012	7:34:34 AM	Run finished at 7:34 AM
2/24/2012	7:34:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	7:39:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:39:23 AM	Recipe started at 7:39 AM
2/24/2012	7:39:23 AM	Helium valve closed
2/24/2012	7:39:23 AM	H2 valve closed
2/24/2012	7:39:23 AM	BCl3 valve closed
2/24/2012	7:39:23 AM	PH3 valve closed
2/24/2012	7:39:23 AM	SiCl4 pre valve closed
2/24/2012	7:39:23 AM	SiCl4 post valve closed
2/24/2012	7:39:23 AM	Main Vac valve closed
2/24/2012	7:39:23 AM	Bubbler valve closed
2/24/2012	7:39:23 AM	Bypass valve opened
2/24/2012	7:39:23 AM	Helium MFC set to  0.000000
2/24/2012	7:39:23 AM	H2 MFC set to  0.000000
2/24/2012	7:39:23 AM	BCl3 MFC set to  0.000000
2/24/2012	7:39:23 AM	PH3 MFC set to  0.000000
2/24/2012	7:39:23 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:39:23 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:39:24 AM	Tube furnace set to 0
2/24/2012	7:40:56 AM	Run aborted at 7:40 AM
2/24/2012	7:40:56 AM	Helium valve closed
2/24/2012	7:40:56 AM	H2 valve closed
2/24/2012	7:40:56 AM	BCl3 valve closed
2/24/2012	7:40:56 AM	PH3 valve closed
2/24/2012	7:40:56 AM	SiCl4 pre valve closed
2/24/2012	7:40:56 AM	SiCl4 post valve closed
2/24/2012	7:40:56 AM	Bypass valve closed
2/24/2012	7:40:56 AM	Main Vac valve closed
2/24/2012	7:40:56 AM	Bubbler valve closed
2/24/2012	7:40:56 AM	Helium MFC set to  0.000000
2/24/2012	7:40:56 AM	H2 MFC set to  0.000000
2/24/2012	7:40:56 AM	BCl3 MFC set to  0.000000
2/24/2012	7:40:56 AM	PH3 MFC set to  0.000000
2/24/2012	7:40:56 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:40:56 AM	Tube furnace set to 0
2/24/2012	7:40:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:41:10 AM	Helium MFC set to  400.000000
2/24/2012	7:41:10 AM	Helium valve opened
2/24/2012	7:41:34 AM	Helium valve closed
2/24/2012	7:41:38 AM	Helium MFC set to  0.000000
2/24/2012	7:41:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:41:42 AM	Recipe started at 7:41 AM
2/24/2012	7:41:42 AM	Helium valve closed
2/24/2012	7:41:42 AM	H2 valve closed
2/24/2012	7:41:42 AM	BCl3 valve closed
2/24/2012	7:41:42 AM	PH3 valve closed
2/24/2012	7:41:42 AM	SiCl4 pre valve closed
2/24/2012	7:41:42 AM	SiCl4 post valve closed
2/24/2012	7:41:42 AM	Main Vac valve closed
2/24/2012	7:41:42 AM	Bubbler valve closed
2/24/2012	7:41:42 AM	Bypass valve opened
2/24/2012	7:41:42 AM	Helium MFC set to  0.000000
2/24/2012	7:41:42 AM	H2 MFC set to  0.000000
2/24/2012	7:41:42 AM	BCl3 MFC set to  0.000000
2/24/2012	7:41:42 AM	PH3 MFC set to  0.000000
2/24/2012	7:41:42 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:41:42 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:41:43 AM	Tube furnace set to 0
2/24/2012	7:42:08 AM	Run aborted at 7:42 AM
2/24/2012	7:42:08 AM	Helium valve closed
2/24/2012	7:42:08 AM	H2 valve closed
2/24/2012	7:42:08 AM	BCl3 valve closed
2/24/2012	7:42:08 AM	PH3 valve closed
2/24/2012	7:42:08 AM	SiCl4 pre valve closed
2/24/2012	7:42:08 AM	SiCl4 post valve closed
2/24/2012	7:42:08 AM	Bypass valve closed
2/24/2012	7:42:08 AM	Main Vac valve closed
2/24/2012	7:42:08 AM	Bubbler valve closed
2/24/2012	7:42:08 AM	Helium MFC set to  0.000000
2/24/2012	7:42:08 AM	H2 MFC set to  0.000000
2/24/2012	7:42:08 AM	BCl3 MFC set to  0.000000
2/24/2012	7:42:08 AM	PH3 MFC set to  0.000000
2/24/2012	7:42:08 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:42:08 AM	Tube furnace set to 0
2/24/2012	7:42:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:42:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	7:42:10 AM	Recipe started at 7:42 AM
2/24/2012	7:42:10 AM	Helium valve closed
2/24/2012	7:42:10 AM	H2 valve closed
2/24/2012	7:42:10 AM	BCl3 valve closed
2/24/2012	7:42:10 AM	PH3 valve closed
2/24/2012	7:42:10 AM	SiCl4 pre valve closed
2/24/2012	7:42:10 AM	SiCl4 post valve closed
2/24/2012	7:42:10 AM	Main Vac valve closed
2/24/2012	7:42:10 AM	Bypass valve closed
2/24/2012	7:42:10 AM	Bubbler valve closed
2/24/2012	7:42:10 AM	Helium MFC set to  0.000000
2/24/2012	7:42:10 AM	H2 MFC set to  0.000000
2/24/2012	7:42:10 AM	BCl3 MFC set to  0.000000
2/24/2012	7:42:10 AM	PH3 MFC set to  0.000000
2/24/2012	7:42:10 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:42:10 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:42:10 AM	Tube furnace set to 0
2/24/2012	7:42:13 AM	H2 valve closed
2/24/2012	7:42:13 AM	BCl3 valve closed
2/24/2012	7:42:13 AM	PH3 valve closed
2/24/2012	7:42:13 AM	SiCl4 pre valve closed
2/24/2012	7:42:13 AM	SiCl4 post valve closed
2/24/2012	7:42:13 AM	Main Vac valve closed
2/24/2012	7:42:13 AM	Bypass valve closed
2/24/2012	7:42:13 AM	Bubbler valve closed
2/24/2012	7:42:13 AM	Helium valve opened
2/24/2012	7:42:13 AM	Helium MFC set to  500.000000
2/24/2012	7:42:13 AM	H2 MFC set to  0.000000
2/24/2012	7:42:13 AM	BCl3 MFC set to  0.000000
2/24/2012	7:42:13 AM	PH3 MFC set to  0.000000
2/24/2012	7:42:13 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:42:13 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:42:14 AM	Tube furnace set to 0
2/24/2012	7:43:14 AM	Helium valve closed
2/24/2012	7:43:14 AM	H2 valve closed
2/24/2012	7:43:14 AM	BCl3 valve closed
2/24/2012	7:43:14 AM	PH3 valve closed
2/24/2012	7:43:14 AM	SiCl4 pre valve closed
2/24/2012	7:43:14 AM	SiCl4 post valve closed
2/24/2012	7:43:14 AM	Main Vac valve closed
2/24/2012	7:43:14 AM	Bypass valve closed
2/24/2012	7:43:14 AM	Bubbler valve closed
2/24/2012	7:43:14 AM	Helium MFC set to  0.000000
2/24/2012	7:43:14 AM	H2 MFC set to  0.000000
2/24/2012	7:43:14 AM	BCl3 MFC set to  0.000000
2/24/2012	7:43:14 AM	PH3 MFC set to  0.000000
2/24/2012	7:43:14 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:43:14 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:43:14 AM	Tube furnace set to 0
2/24/2012	7:43:15 AM	Run finished at 7:43 AM
2/24/2012	7:43:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	7:44:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:44:55 AM	Recipe started at 7:44 AM
2/24/2012	7:44:55 AM	Helium valve closed
2/24/2012	7:44:55 AM	H2 valve closed
2/24/2012	7:44:55 AM	BCl3 valve closed
2/24/2012	7:44:55 AM	PH3 valve closed
2/24/2012	7:44:55 AM	SiCl4 pre valve closed
2/24/2012	7:44:55 AM	SiCl4 post valve closed
2/24/2012	7:44:55 AM	Main Vac valve closed
2/24/2012	7:44:55 AM	Bubbler valve closed
2/24/2012	7:44:55 AM	Bypass valve opened
2/24/2012	7:44:55 AM	Helium MFC set to  0.000000
2/24/2012	7:44:55 AM	H2 MFC set to  0.000000
2/24/2012	7:44:55 AM	BCl3 MFC set to  0.000000
2/24/2012	7:44:55 AM	PH3 MFC set to  0.000000
2/24/2012	7:44:55 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:44:55 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:44:55 AM	Tube furnace set to 0
2/24/2012	7:45:40 AM	Run aborted at 7:45 AM
2/24/2012	7:45:40 AM	Helium valve closed
2/24/2012	7:45:40 AM	H2 valve closed
2/24/2012	7:45:40 AM	BCl3 valve closed
2/24/2012	7:45:40 AM	PH3 valve closed
2/24/2012	7:45:40 AM	SiCl4 pre valve closed
2/24/2012	7:45:40 AM	SiCl4 post valve closed
2/24/2012	7:45:40 AM	Bypass valve closed
2/24/2012	7:45:40 AM	Main Vac valve closed
2/24/2012	7:45:40 AM	Bubbler valve closed
2/24/2012	7:45:40 AM	Helium MFC set to  0.000000
2/24/2012	7:45:40 AM	H2 MFC set to  0.000000
2/24/2012	7:45:40 AM	BCl3 MFC set to  0.000000
2/24/2012	7:45:40 AM	PH3 MFC set to  0.000000
2/24/2012	7:45:40 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:45:41 AM	Tube furnace set to 0
2/24/2012	7:45:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:45:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	7:45:48 AM	Recipe started at 7:45 AM
2/24/2012	7:45:48 AM	Helium valve closed
2/24/2012	7:45:48 AM	H2 valve closed
2/24/2012	7:45:48 AM	BCl3 valve closed
2/24/2012	7:45:48 AM	PH3 valve closed
2/24/2012	7:45:48 AM	SiCl4 pre valve closed
2/24/2012	7:45:48 AM	SiCl4 post valve closed
2/24/2012	7:45:48 AM	Main Vac valve closed
2/24/2012	7:45:48 AM	Bypass valve closed
2/24/2012	7:45:48 AM	Bubbler valve closed
2/24/2012	7:45:48 AM	Helium MFC set to  0.000000
2/24/2012	7:45:48 AM	H2 MFC set to  0.000000
2/24/2012	7:45:48 AM	BCl3 MFC set to  0.000000
2/24/2012	7:45:48 AM	PH3 MFC set to  0.000000
2/24/2012	7:45:48 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:45:48 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:45:48 AM	Tube furnace set to 0
2/24/2012	7:45:51 AM	H2 valve closed
2/24/2012	7:45:51 AM	BCl3 valve closed
2/24/2012	7:45:51 AM	PH3 valve closed
2/24/2012	7:45:51 AM	SiCl4 pre valve closed
2/24/2012	7:45:51 AM	SiCl4 post valve closed
2/24/2012	7:45:51 AM	Main Vac valve closed
2/24/2012	7:45:51 AM	Bypass valve closed
2/24/2012	7:45:51 AM	Bubbler valve closed
2/24/2012	7:45:51 AM	Helium valve opened
2/24/2012	7:45:51 AM	Helium MFC set to  500.000000
2/24/2012	7:45:51 AM	H2 MFC set to  0.000000
2/24/2012	7:45:51 AM	BCl3 MFC set to  0.000000
2/24/2012	7:45:51 AM	PH3 MFC set to  0.000000
2/24/2012	7:45:51 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:45:51 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:45:51 AM	Tube furnace set to 0
2/24/2012	7:46:52 AM	Helium valve closed
2/24/2012	7:46:52 AM	H2 valve closed
2/24/2012	7:46:52 AM	BCl3 valve closed
2/24/2012	7:46:52 AM	PH3 valve closed
2/24/2012	7:46:52 AM	SiCl4 pre valve closed
2/24/2012	7:46:52 AM	SiCl4 post valve closed
2/24/2012	7:46:52 AM	Main Vac valve closed
2/24/2012	7:46:52 AM	Bypass valve closed
2/24/2012	7:46:52 AM	Bubbler valve closed
2/24/2012	7:46:52 AM	Helium MFC set to  0.000000
2/24/2012	7:46:52 AM	H2 MFC set to  0.000000
2/24/2012	7:46:52 AM	BCl3 MFC set to  0.000000
2/24/2012	7:46:52 AM	PH3 MFC set to  0.000000
2/24/2012	7:46:52 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:46:52 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:46:52 AM	Tube furnace set to 0
2/24/2012	7:46:53 AM	Run finished at 7:46 AM
2/24/2012	7:46:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	7:48:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:48:13 AM	Recipe started at 7:48 AM
2/24/2012	7:48:13 AM	Helium valve closed
2/24/2012	7:48:13 AM	H2 valve closed
2/24/2012	7:48:13 AM	BCl3 valve closed
2/24/2012	7:48:13 AM	PH3 valve closed
2/24/2012	7:48:13 AM	SiCl4 pre valve closed
2/24/2012	7:48:13 AM	SiCl4 post valve closed
2/24/2012	7:48:13 AM	Main Vac valve closed
2/24/2012	7:48:13 AM	Bubbler valve closed
2/24/2012	7:48:13 AM	Bypass valve opened
2/24/2012	7:48:13 AM	Helium MFC set to  0.000000
2/24/2012	7:48:13 AM	H2 MFC set to  0.000000
2/24/2012	7:48:13 AM	BCl3 MFC set to  0.000000
2/24/2012	7:48:13 AM	PH3 MFC set to  0.000000
2/24/2012	7:48:13 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:48:13 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:48:14 AM	Tube furnace set to 0
2/24/2012	7:50:48 AM	Helium valve closed
2/24/2012	7:50:48 AM	H2 valve closed
2/24/2012	7:50:48 AM	BCl3 valve closed
2/24/2012	7:50:48 AM	PH3 valve closed
2/24/2012	7:50:48 AM	SiCl4 pre valve closed
2/24/2012	7:50:48 AM	SiCl4 post valve closed
2/24/2012	7:50:48 AM	Main Vac valve closed
2/24/2012	7:50:48 AM	Bubbler valve closed
2/24/2012	7:50:48 AM	Bypass valve opened
2/24/2012	7:50:48 AM	Helium MFC set to  0.000000
2/24/2012	7:50:48 AM	H2 MFC set to  0.000000
2/24/2012	7:50:48 AM	BCl3 MFC set to  0.000000
2/24/2012	7:50:48 AM	PH3 MFC set to  0.000000
2/24/2012	7:50:48 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:50:48 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:50:48 AM	Tube furnace set to 0
2/24/2012	7:50:49 AM	Helium valve closed
2/24/2012	7:50:49 AM	H2 valve closed
2/24/2012	7:50:49 AM	BCl3 valve closed
2/24/2012	7:50:49 AM	PH3 valve closed
2/24/2012	7:50:49 AM	SiCl4 pre valve closed
2/24/2012	7:50:49 AM	SiCl4 post valve closed
2/24/2012	7:50:49 AM	Bypass valve closed
2/24/2012	7:50:49 AM	Bubbler valve closed
2/24/2012	7:50:49 AM	Main Vac valve opened
2/24/2012	7:50:49 AM	Helium MFC set to  0.000000
2/24/2012	7:50:49 AM	H2 MFC set to  0.000000
2/24/2012	7:50:49 AM	BCl3 MFC set to  0.000000
2/24/2012	7:50:49 AM	PH3 MFC set to  0.000000
2/24/2012	7:50:49 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:50:49 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:50:50 AM	Tube furnace set to 0
2/24/2012	7:50:51 AM	Run finished at 7:50 AM
2/24/2012	7:50:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:51:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	7:51:28 AM	Recipe started at 7:51 AM
2/24/2012	7:51:28 AM	Helium valve closed
2/24/2012	7:51:28 AM	H2 valve closed
2/24/2012	7:51:28 AM	BCl3 valve closed
2/24/2012	7:51:28 AM	PH3 valve closed
2/24/2012	7:51:28 AM	SiCl4 pre valve closed
2/24/2012	7:51:28 AM	SiCl4 post valve closed
2/24/2012	7:51:28 AM	Main Vac valve closed
2/24/2012	7:51:28 AM	Bypass valve closed
2/24/2012	7:51:28 AM	Bubbler valve closed
2/24/2012	7:51:28 AM	Helium MFC set to  0.000000
2/24/2012	7:51:28 AM	H2 MFC set to  0.000000
2/24/2012	7:51:28 AM	BCl3 MFC set to  0.000000
2/24/2012	7:51:28 AM	PH3 MFC set to  0.000000
2/24/2012	7:51:28 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:51:28 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:51:28 AM	Tube furnace set to 0
2/24/2012	7:51:31 AM	H2 valve closed
2/24/2012	7:51:31 AM	BCl3 valve closed
2/24/2012	7:51:31 AM	PH3 valve closed
2/24/2012	7:51:31 AM	SiCl4 pre valve closed
2/24/2012	7:51:31 AM	SiCl4 post valve closed
2/24/2012	7:51:31 AM	Main Vac valve closed
2/24/2012	7:51:31 AM	Bypass valve closed
2/24/2012	7:51:31 AM	Bubbler valve closed
2/24/2012	7:51:31 AM	Helium valve opened
2/24/2012	7:51:31 AM	Helium MFC set to  500.000000
2/24/2012	7:51:31 AM	H2 MFC set to  0.000000
2/24/2012	7:51:31 AM	BCl3 MFC set to  0.000000
2/24/2012	7:51:31 AM	PH3 MFC set to  0.000000
2/24/2012	7:51:31 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:51:31 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:51:31 AM	Tube furnace set to 0
2/24/2012	7:52:36 AM	Helium valve closed
2/24/2012	7:52:36 AM	H2 valve closed
2/24/2012	7:52:36 AM	BCl3 valve closed
2/24/2012	7:52:36 AM	PH3 valve closed
2/24/2012	7:52:36 AM	SiCl4 pre valve closed
2/24/2012	7:52:36 AM	SiCl4 post valve closed
2/24/2012	7:52:36 AM	Main Vac valve closed
2/24/2012	7:52:36 AM	Bypass valve closed
2/24/2012	7:52:36 AM	Bubbler valve closed
2/24/2012	7:52:36 AM	Helium MFC set to  0.000000
2/24/2012	7:52:36 AM	H2 MFC set to  0.000000
2/24/2012	7:52:36 AM	BCl3 MFC set to  0.000000
2/24/2012	7:52:36 AM	PH3 MFC set to  0.000000
2/24/2012	7:52:36 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:52:36 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:52:36 AM	Tube furnace set to 0
2/24/2012	7:52:37 AM	Run finished at 7:52 AM
2/24/2012	7:52:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	7:54:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:54:21 AM	Recipe started at 7:54 AM
2/24/2012	7:54:21 AM	Helium valve closed
2/24/2012	7:54:21 AM	H2 valve closed
2/24/2012	7:54:21 AM	BCl3 valve closed
2/24/2012	7:54:21 AM	PH3 valve closed
2/24/2012	7:54:21 AM	SiCl4 pre valve closed
2/24/2012	7:54:21 AM	SiCl4 post valve closed
2/24/2012	7:54:21 AM	Main Vac valve closed
2/24/2012	7:54:21 AM	Bubbler valve closed
2/24/2012	7:54:21 AM	Bypass valve opened
2/24/2012	7:54:21 AM	Helium MFC set to  0.000000
2/24/2012	7:54:21 AM	H2 MFC set to  0.000000
2/24/2012	7:54:21 AM	BCl3 MFC set to  0.000000
2/24/2012	7:54:21 AM	PH3 MFC set to  0.000000
2/24/2012	7:54:21 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:54:21 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:54:21 AM	Tube furnace set to 0
2/24/2012	7:55:22 AM	Helium valve closed
2/24/2012	7:55:23 AM	H2 valve closed
2/24/2012	7:55:23 AM	BCl3 valve closed
2/24/2012	7:55:23 AM	PH3 valve closed
2/24/2012	7:55:23 AM	SiCl4 pre valve closed
2/24/2012	7:55:23 AM	SiCl4 post valve closed
2/24/2012	7:55:23 AM	Main Vac valve closed
2/24/2012	7:55:23 AM	Bubbler valve closed
2/24/2012	7:55:23 AM	Bypass valve opened
2/24/2012	7:55:23 AM	Helium MFC set to  0.000000
2/24/2012	7:55:23 AM	H2 MFC set to  0.000000
2/24/2012	7:55:23 AM	BCl3 MFC set to  0.000000
2/24/2012	7:55:23 AM	PH3 MFC set to  0.000000
2/24/2012	7:55:23 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:55:23 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:55:23 AM	Tube furnace set to 0
2/24/2012	7:55:25 AM	Helium valve closed
2/24/2012	7:55:25 AM	H2 valve closed
2/24/2012	7:55:25 AM	BCl3 valve closed
2/24/2012	7:55:25 AM	PH3 valve closed
2/24/2012	7:55:25 AM	SiCl4 pre valve closed
2/24/2012	7:55:25 AM	SiCl4 post valve closed
2/24/2012	7:55:25 AM	Bypass valve closed
2/24/2012	7:55:25 AM	Bubbler valve closed
2/24/2012	7:55:25 AM	Main Vac valve opened
2/24/2012	7:55:25 AM	Helium MFC set to  0.000000
2/24/2012	7:55:25 AM	H2 MFC set to  0.000000
2/24/2012	7:55:25 AM	BCl3 MFC set to  0.000000
2/24/2012	7:55:25 AM	PH3 MFC set to  0.000000
2/24/2012	7:55:25 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:55:25 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:55:25 AM	Tube furnace set to 0
2/24/2012	7:55:26 AM	Run finished at 7:55 AM
2/24/2012	7:55:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:57:42 AM	Recipe started at 7:57 AM
2/24/2012	7:57:42 AM	Helium valve closed
2/24/2012	7:57:42 AM	H2 valve closed
2/24/2012	7:57:42 AM	BCl3 valve closed
2/24/2012	7:57:42 AM	PH3 valve closed
2/24/2012	7:57:42 AM	SiCl4 pre valve closed
2/24/2012	7:57:42 AM	SiCl4 post valve closed
2/24/2012	7:57:42 AM	Bypass valve closed
2/24/2012	7:57:42 AM	Bubbler valve closed
2/24/2012	7:57:42 AM	Main Vac valve opened
2/24/2012	7:57:42 AM	Helium MFC set to  0.000000
2/24/2012	7:57:42 AM	H2 MFC set to  0.000000
2/24/2012	7:57:42 AM	BCl3 MFC set to  0.000000
2/24/2012	7:57:42 AM	PH3 MFC set to  0.000000
2/24/2012	7:57:42 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:57:42 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:57:42 AM	Tube furnace set to 150
2/24/2012	7:58:12 AM	H2 valve closed
2/24/2012	7:58:12 AM	BCl3 valve closed
2/24/2012	7:58:12 AM	PH3 valve closed
2/24/2012	7:58:12 AM	SiCl4 pre valve closed
2/24/2012	7:58:12 AM	SiCl4 post valve closed
2/24/2012	7:58:12 AM	Bypass valve closed
2/24/2012	7:58:12 AM	Bubbler valve closed
2/24/2012	7:58:12 AM	Helium valve opened
2/24/2012	7:58:12 AM	Main Vac valve opened
2/24/2012	7:58:12 AM	Helium MFC set to  20.000000
2/24/2012	7:58:12 AM	H2 MFC set to  0.000000
2/24/2012	7:58:12 AM	BCl3 MFC set to  0.000000
2/24/2012	7:58:12 AM	PH3 MFC set to  0.000000
2/24/2012	7:58:12 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:58:12 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:58:12 AM	Tube furnace set to 150
2/24/2012	7:58:42 AM	Helium valve closed
2/24/2012	7:58:43 AM	H2 valve closed
2/24/2012	7:58:43 AM	BCl3 valve closed
2/24/2012	7:58:43 AM	PH3 valve closed
2/24/2012	7:58:43 AM	SiCl4 pre valve closed
2/24/2012	7:58:43 AM	SiCl4 post valve closed
2/24/2012	7:58:43 AM	Bypass valve closed
2/24/2012	7:58:43 AM	Bubbler valve closed
2/24/2012	7:58:43 AM	Main Vac valve opened
2/24/2012	7:58:43 AM	Helium MFC set to  0.000000
2/24/2012	7:58:43 AM	H2 MFC set to  0.000000
2/24/2012	7:58:43 AM	BCl3 MFC set to  0.000000
2/24/2012	7:58:43 AM	PH3 MFC set to  0.000000
2/24/2012	7:58:43 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:58:43 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:58:43 AM	Tube furnace set to 150
2/24/2012	7:59:13 AM	H2 valve closed
2/24/2012	7:59:13 AM	BCl3 valve closed
2/24/2012	7:59:13 AM	PH3 valve closed
2/24/2012	7:59:13 AM	SiCl4 pre valve closed
2/24/2012	7:59:13 AM	SiCl4 post valve closed
2/24/2012	7:59:13 AM	Bypass valve closed
2/24/2012	7:59:13 AM	Bubbler valve closed
2/24/2012	7:59:13 AM	Helium valve opened
2/24/2012	7:59:13 AM	Main Vac valve opened
2/24/2012	7:59:13 AM	Helium MFC set to  20.000000
2/24/2012	7:59:13 AM	H2 MFC set to  0.000000
2/24/2012	7:59:13 AM	BCl3 MFC set to  0.000000
2/24/2012	7:59:13 AM	PH3 MFC set to  0.000000
2/24/2012	7:59:13 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:59:13 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:59:13 AM	Tube furnace set to 150
2/24/2012	7:59:43 AM	Helium valve closed
2/24/2012	7:59:43 AM	H2 valve closed
2/24/2012	7:59:43 AM	BCl3 valve closed
2/24/2012	7:59:43 AM	PH3 valve closed
2/24/2012	7:59:43 AM	SiCl4 pre valve closed
2/24/2012	7:59:43 AM	SiCl4 post valve closed
2/24/2012	7:59:43 AM	Bypass valve closed
2/24/2012	7:59:43 AM	Bubbler valve closed
2/24/2012	7:59:43 AM	Main Vac valve opened
2/24/2012	7:59:43 AM	Helium MFC set to  0.000000
2/24/2012	7:59:43 AM	H2 MFC set to  0.000000
2/24/2012	7:59:43 AM	BCl3 MFC set to  0.000000
2/24/2012	7:59:43 AM	PH3 MFC set to  0.000000
2/24/2012	7:59:43 AM	SiCl4 MFC set to  0.000000
2/24/2012	7:59:43 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:59:43 AM	Tube furnace set to 150
2/24/2012	8:00:13 AM	H2 valve closed
2/24/2012	8:00:13 AM	BCl3 valve closed
2/24/2012	8:00:13 AM	PH3 valve closed
2/24/2012	8:00:13 AM	SiCl4 pre valve closed
2/24/2012	8:00:13 AM	SiCl4 post valve closed
2/24/2012	8:00:13 AM	Bypass valve closed
2/24/2012	8:00:13 AM	Bubbler valve closed
2/24/2012	8:00:13 AM	Helium valve opened
2/24/2012	8:00:13 AM	Main Vac valve opened
2/24/2012	8:00:13 AM	Helium MFC set to  20.000000
2/24/2012	8:00:13 AM	H2 MFC set to  0.000000
2/24/2012	8:00:13 AM	BCl3 MFC set to  0.000000
2/24/2012	8:00:13 AM	PH3 MFC set to  0.000000
2/24/2012	8:00:13 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:00:13 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:00:13 AM	Tube furnace set to 150
2/24/2012	8:00:43 AM	Helium valve closed
2/24/2012	8:00:43 AM	H2 valve closed
2/24/2012	8:00:43 AM	BCl3 valve closed
2/24/2012	8:00:43 AM	PH3 valve closed
2/24/2012	8:00:43 AM	SiCl4 pre valve closed
2/24/2012	8:00:43 AM	SiCl4 post valve closed
2/24/2012	8:00:43 AM	Bypass valve closed
2/24/2012	8:00:43 AM	Bubbler valve closed
2/24/2012	8:00:43 AM	Main Vac valve opened
2/24/2012	8:00:43 AM	Helium MFC set to  0.000000
2/24/2012	8:00:43 AM	H2 MFC set to  0.000000
2/24/2012	8:00:43 AM	BCl3 MFC set to  0.000000
2/24/2012	8:00:43 AM	PH3 MFC set to  0.000000
2/24/2012	8:00:43 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:00:43 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:00:43 AM	Tube furnace set to 150
2/24/2012	8:01:14 AM	H2 valve closed
2/24/2012	8:01:14 AM	BCl3 valve closed
2/24/2012	8:01:14 AM	PH3 valve closed
2/24/2012	8:01:14 AM	SiCl4 pre valve closed
2/24/2012	8:01:14 AM	SiCl4 post valve closed
2/24/2012	8:01:14 AM	Bypass valve closed
2/24/2012	8:01:14 AM	Bubbler valve closed
2/24/2012	8:01:14 AM	Helium valve opened
2/24/2012	8:01:14 AM	Main Vac valve opened
2/24/2012	8:01:14 AM	Helium MFC set to  20.000000
2/24/2012	8:01:14 AM	H2 MFC set to  0.000000
2/24/2012	8:01:14 AM	BCl3 MFC set to  0.000000
2/24/2012	8:01:14 AM	PH3 MFC set to  0.000000
2/24/2012	8:01:14 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:01:14 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:01:14 AM	Tube furnace set to 150
2/24/2012	8:01:44 AM	Helium valve closed
2/24/2012	8:01:44 AM	H2 valve closed
2/24/2012	8:01:44 AM	BCl3 valve closed
2/24/2012	8:01:44 AM	PH3 valve closed
2/24/2012	8:01:44 AM	SiCl4 pre valve closed
2/24/2012	8:01:44 AM	SiCl4 post valve closed
2/24/2012	8:01:44 AM	Bypass valve closed
2/24/2012	8:01:44 AM	Bubbler valve closed
2/24/2012	8:01:44 AM	Main Vac valve opened
2/24/2012	8:01:44 AM	Helium MFC set to  0.000000
2/24/2012	8:01:44 AM	H2 MFC set to  0.000000
2/24/2012	8:01:44 AM	BCl3 MFC set to  0.000000
2/24/2012	8:01:44 AM	PH3 MFC set to  0.000000
2/24/2012	8:01:44 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:01:44 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:01:44 AM	Tube furnace set to 150
2/24/2012	8:02:14 AM	H2 valve closed
2/24/2012	8:02:14 AM	BCl3 valve closed
2/24/2012	8:02:14 AM	PH3 valve closed
2/24/2012	8:02:14 AM	SiCl4 pre valve closed
2/24/2012	8:02:14 AM	SiCl4 post valve closed
2/24/2012	8:02:14 AM	Bypass valve closed
2/24/2012	8:02:14 AM	Bubbler valve closed
2/24/2012	8:02:14 AM	Helium valve opened
2/24/2012	8:02:14 AM	Main Vac valve opened
2/24/2012	8:02:14 AM	Helium MFC set to  20.000000
2/24/2012	8:02:14 AM	H2 MFC set to  0.000000
2/24/2012	8:02:14 AM	BCl3 MFC set to  0.000000
2/24/2012	8:02:14 AM	PH3 MFC set to  0.000000
2/24/2012	8:02:14 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:02:14 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:02:14 AM	Tube furnace set to 150
2/24/2012	8:02:44 AM	Helium valve closed
2/24/2012	8:02:44 AM	H2 valve closed
2/24/2012	8:02:44 AM	BCl3 valve closed
2/24/2012	8:02:44 AM	PH3 valve closed
2/24/2012	8:02:44 AM	SiCl4 pre valve closed
2/24/2012	8:02:44 AM	SiCl4 post valve closed
2/24/2012	8:02:44 AM	Bypass valve closed
2/24/2012	8:02:44 AM	Bubbler valve closed
2/24/2012	8:02:44 AM	Main Vac valve opened
2/24/2012	8:02:44 AM	Helium MFC set to  0.000000
2/24/2012	8:02:44 AM	H2 MFC set to  0.000000
2/24/2012	8:02:44 AM	BCl3 MFC set to  0.000000
2/24/2012	8:02:44 AM	PH3 MFC set to  0.000000
2/24/2012	8:02:44 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:02:44 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:02:44 AM	Tube furnace set to 150
2/24/2012	8:03:14 AM	H2 valve closed
2/24/2012	8:03:14 AM	BCl3 valve closed
2/24/2012	8:03:14 AM	PH3 valve closed
2/24/2012	8:03:14 AM	SiCl4 pre valve closed
2/24/2012	8:03:14 AM	SiCl4 post valve closed
2/24/2012	8:03:14 AM	Bypass valve closed
2/24/2012	8:03:14 AM	Bubbler valve closed
2/24/2012	8:03:14 AM	Helium valve opened
2/24/2012	8:03:14 AM	Main Vac valve opened
2/24/2012	8:03:14 AM	Helium MFC set to  20.000000
2/24/2012	8:03:14 AM	H2 MFC set to  0.000000
2/24/2012	8:03:14 AM	BCl3 MFC set to  0.000000
2/24/2012	8:03:14 AM	PH3 MFC set to  0.000000
2/24/2012	8:03:14 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:03:14 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:03:15 AM	Tube furnace set to 150
2/24/2012	8:03:45 AM	Helium valve closed
2/24/2012	8:03:45 AM	H2 valve closed
2/24/2012	8:03:45 AM	BCl3 valve closed
2/24/2012	8:03:45 AM	PH3 valve closed
2/24/2012	8:03:45 AM	SiCl4 pre valve closed
2/24/2012	8:03:45 AM	SiCl4 post valve closed
2/24/2012	8:03:45 AM	Bypass valve closed
2/24/2012	8:03:45 AM	Bubbler valve closed
2/24/2012	8:03:45 AM	Main Vac valve opened
2/24/2012	8:03:45 AM	Helium MFC set to  0.000000
2/24/2012	8:03:45 AM	H2 MFC set to  0.000000
2/24/2012	8:03:45 AM	BCl3 MFC set to  0.000000
2/24/2012	8:03:45 AM	PH3 MFC set to  0.000000
2/24/2012	8:03:45 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:03:45 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:03:45 AM	Tube furnace set to 150
2/24/2012	8:04:15 AM	H2 valve closed
2/24/2012	8:04:15 AM	BCl3 valve closed
2/24/2012	8:04:15 AM	PH3 valve closed
2/24/2012	8:04:15 AM	SiCl4 pre valve closed
2/24/2012	8:04:15 AM	SiCl4 post valve closed
2/24/2012	8:04:15 AM	Bypass valve closed
2/24/2012	8:04:15 AM	Bubbler valve closed
2/24/2012	8:04:15 AM	Helium valve opened
2/24/2012	8:04:15 AM	Main Vac valve opened
2/24/2012	8:04:15 AM	Helium MFC set to  20.000000
2/24/2012	8:04:15 AM	H2 MFC set to  0.000000
2/24/2012	8:04:15 AM	BCl3 MFC set to  0.000000
2/24/2012	8:04:15 AM	PH3 MFC set to  0.000000
2/24/2012	8:04:15 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:04:15 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:04:15 AM	Tube furnace set to 150
2/24/2012	8:04:45 AM	Helium valve closed
2/24/2012	8:04:45 AM	H2 valve closed
2/24/2012	8:04:45 AM	BCl3 valve closed
2/24/2012	8:04:45 AM	PH3 valve closed
2/24/2012	8:04:45 AM	SiCl4 pre valve closed
2/24/2012	8:04:45 AM	SiCl4 post valve closed
2/24/2012	8:04:45 AM	Bypass valve closed
2/24/2012	8:04:45 AM	Bubbler valve closed
2/24/2012	8:04:45 AM	Main Vac valve opened
2/24/2012	8:04:45 AM	Helium MFC set to  0.000000
2/24/2012	8:04:45 AM	H2 MFC set to  0.000000
2/24/2012	8:04:45 AM	BCl3 MFC set to  0.000000
2/24/2012	8:04:45 AM	PH3 MFC set to  0.000000
2/24/2012	8:04:45 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:04:45 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:04:45 AM	Tube furnace set to 150
2/24/2012	8:05:15 AM	H2 valve closed
2/24/2012	8:05:15 AM	BCl3 valve closed
2/24/2012	8:05:15 AM	PH3 valve closed
2/24/2012	8:05:15 AM	SiCl4 pre valve closed
2/24/2012	8:05:15 AM	SiCl4 post valve closed
2/24/2012	8:05:15 AM	Bypass valve closed
2/24/2012	8:05:15 AM	Bubbler valve closed
2/24/2012	8:05:15 AM	Helium valve opened
2/24/2012	8:05:15 AM	Main Vac valve opened
2/24/2012	8:05:15 AM	Helium MFC set to  20.000000
2/24/2012	8:05:15 AM	H2 MFC set to  0.000000
2/24/2012	8:05:15 AM	BCl3 MFC set to  0.000000
2/24/2012	8:05:15 AM	PH3 MFC set to  0.000000
2/24/2012	8:05:15 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:05:15 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:05:15 AM	Tube furnace set to 150
2/24/2012	8:05:45 AM	Helium valve closed
2/24/2012	8:05:45 AM	H2 valve closed
2/24/2012	8:05:45 AM	BCl3 valve closed
2/24/2012	8:05:45 AM	PH3 valve closed
2/24/2012	8:05:45 AM	SiCl4 pre valve closed
2/24/2012	8:05:45 AM	SiCl4 post valve closed
2/24/2012	8:05:45 AM	Bypass valve closed
2/24/2012	8:05:45 AM	Bubbler valve closed
2/24/2012	8:05:45 AM	Main Vac valve opened
2/24/2012	8:05:45 AM	Helium MFC set to  0.000000
2/24/2012	8:05:45 AM	H2 MFC set to  0.000000
2/24/2012	8:05:45 AM	BCl3 MFC set to  0.000000
2/24/2012	8:05:45 AM	PH3 MFC set to  0.000000
2/24/2012	8:05:45 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:05:45 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:05:46 AM	Tube furnace set to 150
2/24/2012	8:06:16 AM	H2 valve closed
2/24/2012	8:06:16 AM	BCl3 valve closed
2/24/2012	8:06:16 AM	PH3 valve closed
2/24/2012	8:06:16 AM	SiCl4 pre valve closed
2/24/2012	8:06:16 AM	SiCl4 post valve closed
2/24/2012	8:06:16 AM	Bypass valve closed
2/24/2012	8:06:16 AM	Bubbler valve closed
2/24/2012	8:06:16 AM	Helium valve opened
2/24/2012	8:06:16 AM	Main Vac valve opened
2/24/2012	8:06:16 AM	Helium MFC set to  20.000000
2/24/2012	8:06:16 AM	H2 MFC set to  0.000000
2/24/2012	8:06:16 AM	BCl3 MFC set to  0.000000
2/24/2012	8:06:16 AM	PH3 MFC set to  0.000000
2/24/2012	8:06:16 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:06:16 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:06:16 AM	Tube furnace set to 150
2/24/2012	8:06:46 AM	Helium valve closed
2/24/2012	8:06:46 AM	H2 valve closed
2/24/2012	8:06:46 AM	BCl3 valve closed
2/24/2012	8:06:46 AM	PH3 valve closed
2/24/2012	8:06:46 AM	SiCl4 pre valve closed
2/24/2012	8:06:46 AM	SiCl4 post valve closed
2/24/2012	8:06:46 AM	Bypass valve closed
2/24/2012	8:06:46 AM	Bubbler valve closed
2/24/2012	8:06:46 AM	Main Vac valve opened
2/24/2012	8:06:46 AM	Helium MFC set to  0.000000
2/24/2012	8:06:46 AM	H2 MFC set to  0.000000
2/24/2012	8:06:46 AM	BCl3 MFC set to  0.000000
2/24/2012	8:06:46 AM	PH3 MFC set to  0.000000
2/24/2012	8:06:46 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:06:46 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:06:46 AM	Tube furnace set to 150
2/24/2012	8:07:16 AM	H2 valve closed
2/24/2012	8:07:16 AM	BCl3 valve closed
2/24/2012	8:07:16 AM	PH3 valve closed
2/24/2012	8:07:16 AM	SiCl4 pre valve closed
2/24/2012	8:07:16 AM	SiCl4 post valve closed
2/24/2012	8:07:16 AM	Bypass valve closed
2/24/2012	8:07:16 AM	Bubbler valve closed
2/24/2012	8:07:16 AM	Helium valve opened
2/24/2012	8:07:16 AM	Main Vac valve opened
2/24/2012	8:07:16 AM	Helium MFC set to  20.000000
2/24/2012	8:07:16 AM	H2 MFC set to  0.000000
2/24/2012	8:07:16 AM	BCl3 MFC set to  0.000000
2/24/2012	8:07:16 AM	PH3 MFC set to  0.000000
2/24/2012	8:07:16 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:07:16 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:07:16 AM	Tube furnace set to 150
2/24/2012	8:07:46 AM	Helium valve closed
2/24/2012	8:07:46 AM	H2 valve closed
2/24/2012	8:07:46 AM	BCl3 valve closed
2/24/2012	8:07:46 AM	PH3 valve closed
2/24/2012	8:07:46 AM	SiCl4 pre valve closed
2/24/2012	8:07:46 AM	SiCl4 post valve closed
2/24/2012	8:07:46 AM	Bypass valve closed
2/24/2012	8:07:46 AM	Bubbler valve closed
2/24/2012	8:07:46 AM	Main Vac valve opened
2/24/2012	8:07:46 AM	Helium MFC set to  0.000000
2/24/2012	8:07:46 AM	H2 MFC set to  0.000000
2/24/2012	8:07:46 AM	BCl3 MFC set to  0.000000
2/24/2012	8:07:46 AM	PH3 MFC set to  0.000000
2/24/2012	8:07:46 AM	SiCl4 MFC set to  0.000000
2/24/2012	8:07:46 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:07:46 AM	Tube furnace set to 150
2/24/2012	8:07:47 AM	Run finished at 8:07 AM
2/24/2012	10:22:26 AM	Main Vac valve closed
2/24/2012	10:22:30 AM	Main Vac valve opened
2/24/2012	10:22:46 AM	Main Vac valve closed
2/24/2012	10:23:11 AM	Main Vac valve opened
2/24/2012	10:27:05 AM	Recipe started at 10:27 AM
2/24/2012	10:27:05 AM	Helium valve closed
2/24/2012	10:27:05 AM	H2 valve closed
2/24/2012	10:27:05 AM	BCl3 valve closed
2/24/2012	10:27:05 AM	PH3 valve closed
2/24/2012	10:27:05 AM	SiCl4 pre valve closed
2/24/2012	10:27:05 AM	SiCl4 post valve closed
2/24/2012	10:27:05 AM	Main Vac valve closed
2/24/2012	10:27:05 AM	Bypass valve closed
2/24/2012	10:27:05 AM	Bubbler valve closed
2/24/2012	10:27:05 AM	Helium MFC set to  0.000000
2/24/2012	10:27:05 AM	H2 MFC set to  0.000000
2/24/2012	10:27:05 AM	BCl3 MFC set to  0.000000
2/24/2012	10:27:05 AM	PH3 MFC set to  0.000000
2/24/2012	10:27:05 AM	SiCl4 MFC set to  0.000000
2/24/2012	10:27:05 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:27:05 AM	Tube furnace set to 0
2/24/2012	10:27:08 AM	Helium valve closed
2/24/2012	10:27:08 AM	BCl3 valve closed
2/24/2012	10:27:08 AM	PH3 valve closed
2/24/2012	10:27:08 AM	SiCl4 pre valve closed
2/24/2012	10:27:08 AM	SiCl4 post valve closed
2/24/2012	10:27:08 AM	Main Vac valve closed
2/24/2012	10:27:08 AM	Bypass valve closed
2/24/2012	10:27:08 AM	Bubbler valve closed
2/24/2012	10:27:08 AM	H2 valve opened
2/24/2012	10:27:08 AM	Helium MFC set to  0.000000
2/24/2012	10:27:08 AM	H2 MFC set to  500.000000
2/24/2012	10:27:08 AM	BCl3 MFC set to  0.000000
2/24/2012	10:27:08 AM	PH3 MFC set to  0.000000
2/24/2012	10:27:08 AM	SiCl4 MFC set to  0.000000
2/24/2012	10:27:08 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:27:09 AM	Tube furnace set to 0
2/24/2012	10:28:12 AM	Helium valve closed
2/24/2012	10:28:12 AM	BCl3 valve closed
2/24/2012	10:28:12 AM	PH3 valve closed
2/24/2012	10:28:12 AM	SiCl4 pre valve closed
2/24/2012	10:28:12 AM	SiCl4 post valve closed
2/24/2012	10:28:12 AM	Main Vac valve closed
2/24/2012	10:28:12 AM	Bypass valve closed
2/24/2012	10:28:12 AM	H2 valve opened
2/24/2012	10:28:12 AM	Bubbler valve opened
2/24/2012	10:28:12 AM	Helium MFC set to  0.000000
2/24/2012	10:28:12 AM	H2 MFC set to  500.000000
2/24/2012	10:28:12 AM	BCl3 MFC set to  0.000000
2/24/2012	10:28:12 AM	PH3 MFC set to  0.000000
2/24/2012	10:28:12 AM	SiCl4 MFC set to  0.000000
2/24/2012	10:28:12 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:28:12 AM	Tube furnace set to 0
2/24/2012	10:28:13 AM	Helium valve closed
2/24/2012	10:28:13 AM	BCl3 valve closed
2/24/2012	10:28:13 AM	PH3 valve closed
2/24/2012	10:28:13 AM	SiCl4 pre valve closed
2/24/2012	10:28:13 AM	SiCl4 post valve closed
2/24/2012	10:28:13 AM	Main Vac valve closed
2/24/2012	10:28:13 AM	Bypass valve closed
2/24/2012	10:28:13 AM	H2 valve opened
2/24/2012	10:28:13 AM	Bubbler valve opened
2/24/2012	10:28:13 AM	Helium MFC set to  0.000000
2/24/2012	10:28:13 AM	H2 MFC set to  500.000000
2/24/2012	10:28:13 AM	BCl3 MFC set to  0.000000
2/24/2012	10:28:13 AM	PH3 MFC set to  0.000000
2/24/2012	10:28:13 AM	SiCl4 MFC set to  0.000000
2/24/2012	10:28:13 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:28:13 AM	Tube furnace set to 1000
2/24/2012	10:48:13 AM	Helium valve closed
2/24/2012	10:48:13 AM	BCl3 valve closed
2/24/2012	10:48:13 AM	Main Vac valve closed
2/24/2012	10:48:13 AM	Bypass valve closed
2/24/2012	10:48:13 AM	H2 valve opened
2/24/2012	10:48:13 AM	PH3 valve opened
2/24/2012	10:48:13 AM	SiCl4 pre valve opened
2/24/2012	10:48:13 AM	SiCl4 post valve opened
2/24/2012	10:48:13 AM	Bubbler valve opened
2/24/2012	10:48:13 AM	Helium MFC set to  0.000000
2/24/2012	10:48:13 AM	H2 MFC set to  500.000000
2/24/2012	10:48:13 AM	BCl3 MFC set to  0.000000
2/24/2012	10:48:13 AM	PH3 MFC set to  0.300000
2/24/2012	10:48:13 AM	SiCl4 MFC set to  25.000000
2/24/2012	10:48:13 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:48:13 AM	Tube furnace set to 1000
2/24/2012	10:57:13 AM	Helium valve closed
2/24/2012	10:57:13 AM	BCl3 valve closed
2/24/2012	10:57:13 AM	PH3 valve closed
2/24/2012	10:57:14 AM	SiCl4 pre valve closed
2/24/2012	10:57:14 AM	SiCl4 post valve closed
2/24/2012	10:57:14 AM	Main Vac valve closed
2/24/2012	10:57:14 AM	Bypass valve closed
2/24/2012	10:57:14 AM	H2 valve opened
2/24/2012	10:57:14 AM	Bubbler valve opened
2/24/2012	10:57:14 AM	Helium MFC set to  0.000000
2/24/2012	10:57:14 AM	H2 MFC set to  500.000000
2/24/2012	10:57:14 AM	BCl3 MFC set to  0.000000
2/24/2012	10:57:14 AM	PH3 MFC set to  0.000000
2/24/2012	10:57:14 AM	SiCl4 MFC set to  0.000000
2/24/2012	10:57:14 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:57:14 AM	Tube furnace set to 750
2/24/2012	11:02:14 AM	H2 valve closed
2/24/2012	11:02:14 AM	BCl3 valve closed
2/24/2012	11:02:14 AM	PH3 valve closed
2/24/2012	11:02:14 AM	SiCl4 pre valve closed
2/24/2012	11:02:14 AM	SiCl4 post valve closed
2/24/2012	11:02:14 AM	Main Vac valve closed
2/24/2012	11:02:14 AM	Bypass valve closed
2/24/2012	11:02:14 AM	Helium valve opened
2/24/2012	11:02:14 AM	Bubbler valve opened
2/24/2012	11:02:14 AM	Helium MFC set to  500.000000
2/24/2012	11:02:14 AM	H2 MFC set to  0.000000
2/24/2012	11:02:14 AM	BCl3 MFC set to  0.000000
2/24/2012	11:02:14 AM	PH3 MFC set to  0.000000
2/24/2012	11:02:14 AM	SiCl4 MFC set to  0.000000
2/24/2012	11:02:14 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	11:02:14 AM	Tube furnace set to 0
2/24/2012	11:22:14 AM	Helium valve closed
2/24/2012	11:22:14 AM	H2 valve closed
2/24/2012	11:22:14 AM	BCl3 valve closed
2/24/2012	11:22:14 AM	PH3 valve closed
2/24/2012	11:22:14 AM	SiCl4 pre valve closed
2/24/2012	11:22:14 AM	SiCl4 post valve closed
2/24/2012	11:22:14 AM	Main Vac valve closed
2/24/2012	11:22:14 AM	Bypass valve closed
2/24/2012	11:22:14 AM	Bubbler valve closed
2/24/2012	11:22:14 AM	Helium MFC set to  0.000000
2/24/2012	11:22:14 AM	H2 MFC set to  0.000000
2/24/2012	11:22:14 AM	BCl3 MFC set to  0.000000
2/24/2012	11:22:14 AM	PH3 MFC set to  0.000000
2/24/2012	11:22:14 AM	SiCl4 MFC set to  0.000000
2/24/2012	11:22:14 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	11:22:14 AM	Tube furnace set to 0
2/24/2012	11:22:15 AM	Run finished at 11:22 AM
2/24/2012	11:34:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	11:34:30 AM	Recipe started at 11:34 AM
2/24/2012	11:34:30 AM	Helium valve closed
2/24/2012	11:34:30 AM	H2 valve closed
2/24/2012	11:34:30 AM	BCl3 valve closed
2/24/2012	11:34:30 AM	PH3 valve closed
2/24/2012	11:34:30 AM	SiCl4 pre valve closed
2/24/2012	11:34:30 AM	SiCl4 post valve closed
2/24/2012	11:34:30 AM	Main Vac valve closed
2/24/2012	11:34:30 AM	Bypass valve closed
2/24/2012	11:34:30 AM	Bubbler valve closed
2/24/2012	11:34:30 AM	Helium MFC set to  0.000000
2/24/2012	11:34:30 AM	H2 MFC set to  0.000000
2/24/2012	11:34:30 AM	BCl3 MFC set to  0.000000
2/24/2012	11:34:30 AM	PH3 MFC set to  0.000000
2/24/2012	11:34:30 AM	SiCl4 MFC set to  0.000000
2/24/2012	11:34:30 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	11:34:30 AM	Tube furnace set to 0
2/24/2012	11:34:33 AM	H2 valve closed
2/24/2012	11:34:33 AM	BCl3 valve closed
2/24/2012	11:34:33 AM	PH3 valve closed
2/24/2012	11:34:33 AM	SiCl4 pre valve closed
2/24/2012	11:34:33 AM	SiCl4 post valve closed
2/24/2012	11:34:33 AM	Main Vac valve closed
2/24/2012	11:34:33 AM	Bypass valve closed
2/24/2012	11:34:33 AM	Bubbler valve closed
2/24/2012	11:34:33 AM	Helium valve opened
2/24/2012	11:34:33 AM	Helium MFC set to  500.000000
2/24/2012	11:34:33 AM	H2 MFC set to  0.000000
2/24/2012	11:34:33 AM	BCl3 MFC set to  0.000000
2/24/2012	11:34:33 AM	PH3 MFC set to  0.000000
2/24/2012	11:34:33 AM	SiCl4 MFC set to  0.000000
2/24/2012	11:34:33 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	11:34:34 AM	Tube furnace set to 0
2/24/2012	11:34:39 AM	Helium valve closed
2/24/2012	11:34:39 AM	H2 valve closed
2/24/2012	11:34:39 AM	BCl3 valve closed
2/24/2012	11:34:39 AM	PH3 valve closed
2/24/2012	11:34:39 AM	SiCl4 pre valve closed
2/24/2012	11:34:39 AM	SiCl4 post valve closed
2/24/2012	11:34:39 AM	Main Vac valve closed
2/24/2012	11:34:39 AM	Bypass valve closed
2/24/2012	11:34:39 AM	Bubbler valve closed
2/24/2012	11:34:39 AM	Helium MFC set to  0.000000
2/24/2012	11:34:39 AM	H2 MFC set to  0.000000
2/24/2012	11:34:39 AM	BCl3 MFC set to  0.000000
2/24/2012	11:34:39 AM	PH3 MFC set to  0.000000
2/24/2012	11:34:39 AM	SiCl4 MFC set to  0.000000
2/24/2012	11:34:39 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	11:34:39 AM	Tube furnace set to 0
2/24/2012	11:34:40 AM	Run finished at 11:34 AM
2/24/2012	11:34:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	11:37:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	11:37:24 AM	Recipe started at 11:37 AM
2/24/2012	11:37:24 AM	Helium valve closed
2/24/2012	11:37:24 AM	H2 valve closed
2/24/2012	11:37:24 AM	BCl3 valve closed
2/24/2012	11:37:24 AM	PH3 valve closed
2/24/2012	11:37:24 AM	SiCl4 pre valve closed
2/24/2012	11:37:24 AM	SiCl4 post valve closed
2/24/2012	11:37:24 AM	Main Vac valve closed
2/24/2012	11:37:24 AM	Bubbler valve closed
2/24/2012	11:37:24 AM	Bypass valve opened
2/24/2012	11:37:24 AM	Helium MFC set to  0.000000
2/24/2012	11:37:24 AM	H2 MFC set to  0.000000
2/24/2012	11:37:24 AM	BCl3 MFC set to  0.000000
2/24/2012	11:37:24 AM	PH3 MFC set to  0.000000
2/24/2012	11:37:24 AM	SiCl4 MFC set to  0.000000
2/24/2012	11:37:24 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	11:37:25 AM	Tube furnace set to 0
2/24/2012	11:38:25 AM	Helium valve closed
2/24/2012	11:38:25 AM	H2 valve closed
2/24/2012	11:38:25 AM	BCl3 valve closed
2/24/2012	11:38:25 AM	PH3 valve closed
2/24/2012	11:38:25 AM	SiCl4 pre valve closed
2/24/2012	11:38:25 AM	SiCl4 post valve closed
2/24/2012	11:38:25 AM	Main Vac valve closed
2/24/2012	11:38:25 AM	Bubbler valve closed
2/24/2012	11:38:25 AM	Bypass valve opened
2/24/2012	11:38:25 AM	Helium MFC set to  0.000000
2/24/2012	11:38:25 AM	H2 MFC set to  0.000000
2/24/2012	11:38:25 AM	BCl3 MFC set to  0.000000
2/24/2012	11:38:25 AM	PH3 MFC set to  0.000000
2/24/2012	11:38:25 AM	SiCl4 MFC set to  0.000000
2/24/2012	11:38:25 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	11:38:25 AM	Tube furnace set to 0
2/24/2012	11:39:25 AM	Helium valve closed
2/24/2012	11:39:25 AM	H2 valve closed
2/24/2012	11:39:25 AM	BCl3 valve closed
2/24/2012	11:39:25 AM	PH3 valve closed
2/24/2012	11:39:25 AM	SiCl4 pre valve closed
2/24/2012	11:39:25 AM	SiCl4 post valve closed
2/24/2012	11:39:25 AM	Bypass valve closed
2/24/2012	11:39:25 AM	Bubbler valve closed
2/24/2012	11:39:25 AM	Main Vac valve opened
2/24/2012	11:39:25 AM	Helium MFC set to  0.000000
2/24/2012	11:39:25 AM	H2 MFC set to  0.000000
2/24/2012	11:39:25 AM	BCl3 MFC set to  0.000000
2/24/2012	11:39:25 AM	PH3 MFC set to  0.000000
2/24/2012	11:39:25 AM	SiCl4 MFC set to  0.000000
2/24/2012	11:39:25 AM	Bypass solenoid MFC set to  0.000000
2/24/2012	11:39:25 AM	Tube furnace set to 0
2/24/2012	11:39:26 AM	Run finished at 11:39 AM
2/24/2012	11:39:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	12:04:01 PM	Main Vac valve closed
2/24/2012	12:04:21 PM	Main Vac valve opened
2/24/2012	12:05:30 PM	Recipe started at 12:05 PM
2/24/2012	12:05:30 PM	Helium valve closed
2/24/2012	12:05:30 PM	H2 valve closed
2/24/2012	12:05:30 PM	BCl3 valve closed
2/24/2012	12:05:30 PM	PH3 valve closed
2/24/2012	12:05:30 PM	SiCl4 pre valve closed
2/24/2012	12:05:30 PM	SiCl4 post valve closed
2/24/2012	12:05:30 PM	Main Vac valve closed
2/24/2012	12:05:30 PM	Bypass valve closed
2/24/2012	12:05:30 PM	Bubbler valve closed
2/24/2012	12:05:30 PM	Helium MFC set to  0.000000
2/24/2012	12:05:30 PM	H2 MFC set to  0.000000
2/24/2012	12:05:30 PM	BCl3 MFC set to  0.000000
2/24/2012	12:05:30 PM	PH3 MFC set to  0.000000
2/24/2012	12:05:30 PM	SiCl4 MFC set to  0.000000
2/24/2012	12:05:30 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	12:05:30 PM	Tube furnace set to 0
2/24/2012	12:05:33 PM	Helium valve closed
2/24/2012	12:05:33 PM	BCl3 valve closed
2/24/2012	12:05:33 PM	PH3 valve closed
2/24/2012	12:05:33 PM	SiCl4 pre valve closed
2/24/2012	12:05:33 PM	SiCl4 post valve closed
2/24/2012	12:05:33 PM	Main Vac valve closed
2/24/2012	12:05:33 PM	Bypass valve closed
2/24/2012	12:05:33 PM	Bubbler valve closed
2/24/2012	12:05:33 PM	H2 valve opened
2/24/2012	12:05:33 PM	Helium MFC set to  0.000000
2/24/2012	12:05:33 PM	H2 MFC set to  500.000000
2/24/2012	12:05:33 PM	BCl3 MFC set to  0.000000
2/24/2012	12:05:33 PM	PH3 MFC set to  0.000000
2/24/2012	12:05:33 PM	SiCl4 MFC set to  0.000000
2/24/2012	12:05:33 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	12:05:33 PM	Tube furnace set to 0
2/24/2012	12:06:39 PM	Helium valve closed
2/24/2012	12:06:39 PM	BCl3 valve closed
2/24/2012	12:06:39 PM	PH3 valve closed
2/24/2012	12:06:39 PM	SiCl4 pre valve closed
2/24/2012	12:06:39 PM	SiCl4 post valve closed
2/24/2012	12:06:39 PM	Main Vac valve closed
2/24/2012	12:06:39 PM	Bypass valve closed
2/24/2012	12:06:39 PM	H2 valve opened
2/24/2012	12:06:39 PM	Bubbler valve opened
2/24/2012	12:06:39 PM	Helium MFC set to  0.000000
2/24/2012	12:06:39 PM	H2 MFC set to  500.000000
2/24/2012	12:06:39 PM	BCl3 MFC set to  0.000000
2/24/2012	12:06:39 PM	PH3 MFC set to  0.000000
2/24/2012	12:06:39 PM	SiCl4 MFC set to  0.000000
2/24/2012	12:06:39 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	12:06:39 PM	Tube furnace set to 0
2/24/2012	12:06:40 PM	Helium valve closed
2/24/2012	12:06:40 PM	BCl3 valve closed
2/24/2012	12:06:40 PM	PH3 valve closed
2/24/2012	12:06:40 PM	SiCl4 pre valve closed
2/24/2012	12:06:40 PM	SiCl4 post valve closed
2/24/2012	12:06:40 PM	Main Vac valve closed
2/24/2012	12:06:40 PM	Bypass valve closed
2/24/2012	12:06:40 PM	H2 valve opened
2/24/2012	12:06:40 PM	Bubbler valve opened
2/24/2012	12:06:40 PM	Helium MFC set to  0.000000
2/24/2012	12:06:40 PM	H2 MFC set to  500.000000
2/24/2012	12:06:40 PM	BCl3 MFC set to  0.000000
2/24/2012	12:06:40 PM	PH3 MFC set to  0.000000
2/24/2012	12:06:40 PM	SiCl4 MFC set to  0.000000
2/24/2012	12:06:40 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	12:06:41 PM	Tube furnace set to 1000
2/24/2012	12:26:41 PM	Helium valve closed
2/24/2012	12:26:41 PM	BCl3 valve closed
2/24/2012	12:26:41 PM	Main Vac valve closed
2/24/2012	12:26:41 PM	Bypass valve closed
2/24/2012	12:26:41 PM	H2 valve opened
2/24/2012	12:26:41 PM	PH3 valve opened
2/24/2012	12:26:41 PM	SiCl4 pre valve opened
2/24/2012	12:26:41 PM	SiCl4 post valve opened
2/24/2012	12:26:41 PM	Bubbler valve opened
2/24/2012	12:26:41 PM	Helium MFC set to  0.000000
2/24/2012	12:26:41 PM	H2 MFC set to  500.000000
2/24/2012	12:26:41 PM	BCl3 MFC set to  0.000000
2/24/2012	12:26:41 PM	PH3 MFC set to  0.300000
2/24/2012	12:26:41 PM	SiCl4 MFC set to  25.000000
2/24/2012	12:26:41 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	12:26:41 PM	Tube furnace set to 1000
2/24/2012	12:35:41 PM	Helium valve closed
2/24/2012	12:35:41 PM	BCl3 valve closed
2/24/2012	12:35:41 PM	PH3 valve closed
2/24/2012	12:35:41 PM	SiCl4 pre valve closed
2/24/2012	12:35:41 PM	SiCl4 post valve closed
2/24/2012	12:35:41 PM	Main Vac valve closed
2/24/2012	12:35:41 PM	Bypass valve closed
2/24/2012	12:35:41 PM	H2 valve opened
2/24/2012	12:35:41 PM	Bubbler valve opened
2/24/2012	12:35:41 PM	Helium MFC set to  0.000000
2/24/2012	12:35:41 PM	H2 MFC set to  500.000000
2/24/2012	12:35:41 PM	BCl3 MFC set to  0.000000
2/24/2012	12:35:41 PM	PH3 MFC set to  0.000000
2/24/2012	12:35:41 PM	SiCl4 MFC set to  0.000000
2/24/2012	12:35:41 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	12:35:41 PM	Tube furnace set to 750
2/24/2012	12:40:41 PM	H2 valve closed
2/24/2012	12:40:41 PM	BCl3 valve closed
2/24/2012	12:40:41 PM	PH3 valve closed
2/24/2012	12:40:41 PM	SiCl4 pre valve closed
2/24/2012	12:40:41 PM	SiCl4 post valve closed
2/24/2012	12:40:41 PM	Main Vac valve closed
2/24/2012	12:40:41 PM	Bypass valve closed
2/24/2012	12:40:41 PM	Helium valve opened
2/24/2012	12:40:41 PM	Bubbler valve opened
2/24/2012	12:40:41 PM	Helium MFC set to  500.000000
2/24/2012	12:40:41 PM	H2 MFC set to  0.000000
2/24/2012	12:40:41 PM	BCl3 MFC set to  0.000000
2/24/2012	12:40:41 PM	PH3 MFC set to  0.000000
2/24/2012	12:40:41 PM	SiCl4 MFC set to  0.000000
2/24/2012	12:40:41 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	12:40:41 PM	Tube furnace set to 0
2/24/2012	1:00:41 PM	Helium valve closed
2/24/2012	1:00:41 PM	H2 valve closed
2/24/2012	1:00:41 PM	BCl3 valve closed
2/24/2012	1:00:41 PM	PH3 valve closed
2/24/2012	1:00:41 PM	SiCl4 pre valve closed
2/24/2012	1:00:41 PM	SiCl4 post valve closed
2/24/2012	1:00:41 PM	Main Vac valve closed
2/24/2012	1:00:41 PM	Bypass valve closed
2/24/2012	1:00:41 PM	Bubbler valve closed
2/24/2012	1:00:41 PM	Helium MFC set to  0.000000
2/24/2012	1:00:41 PM	H2 MFC set to  0.000000
2/24/2012	1:00:41 PM	BCl3 MFC set to  0.000000
2/24/2012	1:00:41 PM	PH3 MFC set to  0.000000
2/24/2012	1:00:41 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:00:41 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:00:41 PM	Tube furnace set to 0
2/24/2012	1:00:42 PM	Run finished at 1:00 PM
2/24/2012	1:05:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	1:05:25 PM	Recipe started at 1:05 PM
2/24/2012	1:05:25 PM	Helium valve closed
2/24/2012	1:05:25 PM	H2 valve closed
2/24/2012	1:05:25 PM	BCl3 valve closed
2/24/2012	1:05:25 PM	PH3 valve closed
2/24/2012	1:05:25 PM	SiCl4 pre valve closed
2/24/2012	1:05:25 PM	SiCl4 post valve closed
2/24/2012	1:05:25 PM	Main Vac valve closed
2/24/2012	1:05:25 PM	Bypass valve closed
2/24/2012	1:05:25 PM	Bubbler valve closed
2/24/2012	1:05:25 PM	Helium MFC set to  0.000000
2/24/2012	1:05:25 PM	H2 MFC set to  0.000000
2/24/2012	1:05:25 PM	BCl3 MFC set to  0.000000
2/24/2012	1:05:25 PM	PH3 MFC set to  0.000000
2/24/2012	1:05:25 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:05:25 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:05:25 PM	Tube furnace set to 0
2/24/2012	1:05:28 PM	H2 valve closed
2/24/2012	1:05:28 PM	BCl3 valve closed
2/24/2012	1:05:28 PM	PH3 valve closed
2/24/2012	1:05:28 PM	SiCl4 pre valve closed
2/24/2012	1:05:28 PM	SiCl4 post valve closed
2/24/2012	1:05:28 PM	Main Vac valve closed
2/24/2012	1:05:28 PM	Bypass valve closed
2/24/2012	1:05:28 PM	Bubbler valve closed
2/24/2012	1:05:28 PM	Helium valve opened
2/24/2012	1:05:28 PM	Helium MFC set to  500.000000
2/24/2012	1:05:28 PM	H2 MFC set to  0.000000
2/24/2012	1:05:28 PM	BCl3 MFC set to  0.000000
2/24/2012	1:05:28 PM	PH3 MFC set to  0.000000
2/24/2012	1:05:28 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:05:28 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:05:28 PM	Tube furnace set to 0
2/24/2012	1:05:30 PM	Helium valve closed
2/24/2012	1:05:30 PM	H2 valve closed
2/24/2012	1:05:30 PM	BCl3 valve closed
2/24/2012	1:05:30 PM	PH3 valve closed
2/24/2012	1:05:30 PM	SiCl4 pre valve closed
2/24/2012	1:05:30 PM	SiCl4 post valve closed
2/24/2012	1:05:30 PM	Main Vac valve closed
2/24/2012	1:05:30 PM	Bypass valve closed
2/24/2012	1:05:30 PM	Bubbler valve closed
2/24/2012	1:05:30 PM	Helium MFC set to  0.000000
2/24/2012	1:05:30 PM	H2 MFC set to  0.000000
2/24/2012	1:05:30 PM	BCl3 MFC set to  0.000000
2/24/2012	1:05:30 PM	PH3 MFC set to  0.000000
2/24/2012	1:05:30 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:05:30 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:05:31 PM	Tube furnace set to 0
2/24/2012	1:05:32 PM	Run finished at 1:05 PM
2/24/2012	1:05:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	1:08:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	1:08:36 PM	Recipe started at 1:08 PM
2/24/2012	1:08:36 PM	Helium valve closed
2/24/2012	1:08:36 PM	H2 valve closed
2/24/2012	1:08:36 PM	BCl3 valve closed
2/24/2012	1:08:36 PM	PH3 valve closed
2/24/2012	1:08:36 PM	SiCl4 pre valve closed
2/24/2012	1:08:36 PM	SiCl4 post valve closed
2/24/2012	1:08:36 PM	Main Vac valve closed
2/24/2012	1:08:36 PM	Bubbler valve closed
2/24/2012	1:08:36 PM	Bypass valve opened
2/24/2012	1:08:36 PM	Helium MFC set to  0.000000
2/24/2012	1:08:36 PM	H2 MFC set to  0.000000
2/24/2012	1:08:36 PM	BCl3 MFC set to  0.000000
2/24/2012	1:08:36 PM	PH3 MFC set to  0.000000
2/24/2012	1:08:36 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:08:36 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:08:37 PM	Tube furnace set to 0
2/24/2012	1:09:36 PM	Helium valve closed
2/24/2012	1:09:36 PM	H2 valve closed
2/24/2012	1:09:36 PM	BCl3 valve closed
2/24/2012	1:09:36 PM	PH3 valve closed
2/24/2012	1:09:36 PM	SiCl4 pre valve closed
2/24/2012	1:09:36 PM	SiCl4 post valve closed
2/24/2012	1:09:36 PM	Main Vac valve closed
2/24/2012	1:09:36 PM	Bubbler valve closed
2/24/2012	1:09:36 PM	Bypass valve opened
2/24/2012	1:09:36 PM	Helium MFC set to  0.000000
2/24/2012	1:09:36 PM	H2 MFC set to  0.000000
2/24/2012	1:09:36 PM	BCl3 MFC set to  0.000000
2/24/2012	1:09:36 PM	PH3 MFC set to  0.000000
2/24/2012	1:09:36 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:09:36 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:09:36 PM	Tube furnace set to 0
2/24/2012	1:10:36 PM	Helium valve closed
2/24/2012	1:10:36 PM	H2 valve closed
2/24/2012	1:10:36 PM	BCl3 valve closed
2/24/2012	1:10:36 PM	PH3 valve closed
2/24/2012	1:10:36 PM	SiCl4 pre valve closed
2/24/2012	1:10:36 PM	SiCl4 post valve closed
2/24/2012	1:10:36 PM	Bypass valve closed
2/24/2012	1:10:36 PM	Bubbler valve closed
2/24/2012	1:10:36 PM	Main Vac valve opened
2/24/2012	1:10:36 PM	Helium MFC set to  0.000000
2/24/2012	1:10:36 PM	H2 MFC set to  0.000000
2/24/2012	1:10:36 PM	BCl3 MFC set to  0.000000
2/24/2012	1:10:36 PM	PH3 MFC set to  0.000000
2/24/2012	1:10:36 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:10:36 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:10:36 PM	Tube furnace set to 0
2/24/2012	1:10:37 PM	Run finished at 1:10 PM
2/24/2012	1:10:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	1:42:44 PM	Main Vac valve closed
2/24/2012	1:43:13 PM	Main Vac valve opened
2/24/2012	1:43:53 PM	Recipe started at 1:43 PM
2/24/2012	1:43:53 PM	Helium valve closed
2/24/2012	1:43:53 PM	H2 valve closed
2/24/2012	1:43:53 PM	BCl3 valve closed
2/24/2012	1:43:53 PM	PH3 valve closed
2/24/2012	1:43:53 PM	SiCl4 pre valve closed
2/24/2012	1:43:53 PM	SiCl4 post valve closed
2/24/2012	1:43:53 PM	Main Vac valve closed
2/24/2012	1:43:53 PM	Bypass valve closed
2/24/2012	1:43:53 PM	Bubbler valve closed
2/24/2012	1:43:53 PM	Helium MFC set to  0.000000
2/24/2012	1:43:53 PM	H2 MFC set to  0.000000
2/24/2012	1:43:53 PM	BCl3 MFC set to  0.000000
2/24/2012	1:43:53 PM	PH3 MFC set to  0.000000
2/24/2012	1:43:53 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:43:53 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:43:53 PM	Tube furnace set to 0
2/24/2012	1:43:56 PM	Helium valve closed
2/24/2012	1:43:56 PM	BCl3 valve closed
2/24/2012	1:43:56 PM	PH3 valve closed
2/24/2012	1:43:56 PM	SiCl4 pre valve closed
2/24/2012	1:43:56 PM	SiCl4 post valve closed
2/24/2012	1:43:56 PM	Main Vac valve closed
2/24/2012	1:43:56 PM	Bypass valve closed
2/24/2012	1:43:56 PM	Bubbler valve closed
2/24/2012	1:43:56 PM	H2 valve opened
2/24/2012	1:43:56 PM	Helium MFC set to  0.000000
2/24/2012	1:43:56 PM	H2 MFC set to  500.000000
2/24/2012	1:43:57 PM	BCl3 MFC set to  0.000000
2/24/2012	1:43:57 PM	PH3 MFC set to  0.000000
2/24/2012	1:43:57 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:43:57 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:43:57 PM	Tube furnace set to 0
2/24/2012	1:45:03 PM	Helium valve closed
2/24/2012	1:45:03 PM	BCl3 valve closed
2/24/2012	1:45:03 PM	PH3 valve closed
2/24/2012	1:45:03 PM	SiCl4 pre valve closed
2/24/2012	1:45:03 PM	SiCl4 post valve closed
2/24/2012	1:45:03 PM	Main Vac valve closed
2/24/2012	1:45:03 PM	Bypass valve closed
2/24/2012	1:45:03 PM	H2 valve opened
2/24/2012	1:45:03 PM	Bubbler valve opened
2/24/2012	1:45:03 PM	Helium MFC set to  0.000000
2/24/2012	1:45:03 PM	H2 MFC set to  500.000000
2/24/2012	1:45:03 PM	BCl3 MFC set to  0.000000
2/24/2012	1:45:03 PM	PH3 MFC set to  0.000000
2/24/2012	1:45:03 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:45:03 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:45:04 PM	Tube furnace set to 0
2/24/2012	1:45:05 PM	Helium valve closed
2/24/2012	1:45:05 PM	BCl3 valve closed
2/24/2012	1:45:05 PM	PH3 valve closed
2/24/2012	1:45:05 PM	SiCl4 pre valve closed
2/24/2012	1:45:05 PM	SiCl4 post valve closed
2/24/2012	1:45:05 PM	Main Vac valve closed
2/24/2012	1:45:05 PM	Bypass valve closed
2/24/2012	1:45:05 PM	H2 valve opened
2/24/2012	1:45:05 PM	Bubbler valve opened
2/24/2012	1:45:05 PM	Helium MFC set to  0.000000
2/24/2012	1:45:05 PM	H2 MFC set to  500.000000
2/24/2012	1:45:05 PM	BCl3 MFC set to  0.000000
2/24/2012	1:45:05 PM	PH3 MFC set to  0.000000
2/24/2012	1:45:05 PM	SiCl4 MFC set to  0.000000
2/24/2012	1:45:05 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	1:45:05 PM	Tube furnace set to 1000
2/24/2012	2:05:05 PM	Helium valve closed
2/24/2012	2:05:05 PM	BCl3 valve closed
2/24/2012	2:05:05 PM	Main Vac valve closed
2/24/2012	2:05:05 PM	Bypass valve closed
2/24/2012	2:05:05 PM	H2 valve opened
2/24/2012	2:05:05 PM	PH3 valve opened
2/24/2012	2:05:05 PM	SiCl4 pre valve opened
2/24/2012	2:05:05 PM	SiCl4 post valve opened
2/24/2012	2:05:05 PM	Bubbler valve opened
2/24/2012	2:05:05 PM	Helium MFC set to  0.000000
2/24/2012	2:05:05 PM	H2 MFC set to  500.000000
2/24/2012	2:05:05 PM	BCl3 MFC set to  0.000000
2/24/2012	2:05:05 PM	PH3 MFC set to  0.300000
2/24/2012	2:05:05 PM	SiCl4 MFC set to  25.000000
2/24/2012	2:05:05 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:05:05 PM	Tube furnace set to 1000
2/24/2012	2:14:05 PM	Helium valve closed
2/24/2012	2:14:05 PM	BCl3 valve closed
2/24/2012	2:14:05 PM	PH3 valve closed
2/24/2012	2:14:05 PM	SiCl4 pre valve closed
2/24/2012	2:14:05 PM	SiCl4 post valve closed
2/24/2012	2:14:05 PM	Main Vac valve closed
2/24/2012	2:14:05 PM	Bypass valve closed
2/24/2012	2:14:05 PM	H2 valve opened
2/24/2012	2:14:05 PM	Bubbler valve opened
2/24/2012	2:14:05 PM	Helium MFC set to  0.000000
2/24/2012	2:14:05 PM	H2 MFC set to  500.000000
2/24/2012	2:14:05 PM	BCl3 MFC set to  0.000000
2/24/2012	2:14:05 PM	PH3 MFC set to  0.000000
2/24/2012	2:14:05 PM	SiCl4 MFC set to  0.000000
2/24/2012	2:14:05 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:14:05 PM	Tube furnace set to 750
2/24/2012	2:19:05 PM	H2 valve closed
2/24/2012	2:19:05 PM	BCl3 valve closed
2/24/2012	2:19:05 PM	PH3 valve closed
2/24/2012	2:19:05 PM	SiCl4 pre valve closed
2/24/2012	2:19:05 PM	SiCl4 post valve closed
2/24/2012	2:19:05 PM	Main Vac valve closed
2/24/2012	2:19:05 PM	Bypass valve closed
2/24/2012	2:19:05 PM	Helium valve opened
2/24/2012	2:19:05 PM	Bubbler valve opened
2/24/2012	2:19:05 PM	Helium MFC set to  500.000000
2/24/2012	2:19:05 PM	H2 MFC set to  0.000000
2/24/2012	2:19:05 PM	BCl3 MFC set to  0.000000
2/24/2012	2:19:05 PM	PH3 MFC set to  0.000000
2/24/2012	2:19:05 PM	SiCl4 MFC set to  0.000000
2/24/2012	2:19:05 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:19:05 PM	Tube furnace set to 0
2/24/2012	2:39:05 PM	Helium valve closed
2/24/2012	2:39:05 PM	H2 valve closed
2/24/2012	2:39:05 PM	BCl3 valve closed
2/24/2012	2:39:05 PM	PH3 valve closed
2/24/2012	2:39:05 PM	SiCl4 pre valve closed
2/24/2012	2:39:05 PM	SiCl4 post valve closed
2/24/2012	2:39:05 PM	Main Vac valve closed
2/24/2012	2:39:05 PM	Bypass valve closed
2/24/2012	2:39:05 PM	Bubbler valve closed
2/24/2012	2:39:05 PM	Helium MFC set to  0.000000
2/24/2012	2:39:05 PM	H2 MFC set to  0.000000
2/24/2012	2:39:05 PM	BCl3 MFC set to  0.000000
2/24/2012	2:39:05 PM	PH3 MFC set to  0.000000
2/24/2012	2:39:05 PM	SiCl4 MFC set to  0.000000
2/24/2012	2:39:05 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:39:05 PM	Tube furnace set to 0
2/24/2012	2:39:06 PM	Run finished at 2:39 PM
2/24/2012	2:53:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	2:54:00 PM	Recipe started at 2:54 PM
2/24/2012	2:54:00 PM	Helium valve closed
2/24/2012	2:54:00 PM	H2 valve closed
2/24/2012	2:54:00 PM	BCl3 valve closed
2/24/2012	2:54:00 PM	PH3 valve closed
2/24/2012	2:54:00 PM	SiCl4 pre valve closed
2/24/2012	2:54:00 PM	SiCl4 post valve closed
2/24/2012	2:54:00 PM	Main Vac valve closed
2/24/2012	2:54:00 PM	Bypass valve closed
2/24/2012	2:54:00 PM	Bubbler valve closed
2/24/2012	2:54:00 PM	Helium MFC set to  0.000000
2/24/2012	2:54:00 PM	H2 MFC set to  0.000000
2/24/2012	2:54:00 PM	BCl3 MFC set to  0.000000
2/24/2012	2:54:00 PM	PH3 MFC set to  0.000000
2/24/2012	2:54:00 PM	SiCl4 MFC set to  0.000000
2/24/2012	2:54:00 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:54:00 PM	Tube furnace set to 0
2/24/2012	2:54:03 PM	H2 valve closed
2/24/2012	2:54:03 PM	BCl3 valve closed
2/24/2012	2:54:03 PM	PH3 valve closed
2/24/2012	2:54:03 PM	SiCl4 pre valve closed
2/24/2012	2:54:03 PM	SiCl4 post valve closed
2/24/2012	2:54:03 PM	Main Vac valve closed
2/24/2012	2:54:03 PM	Bypass valve closed
2/24/2012	2:54:03 PM	Bubbler valve closed
2/24/2012	2:54:03 PM	Helium valve opened
2/24/2012	2:54:03 PM	Helium MFC set to  500.000000
2/24/2012	2:54:03 PM	H2 MFC set to  0.000000
2/24/2012	2:54:03 PM	BCl3 MFC set to  0.000000
2/24/2012	2:54:03 PM	PH3 MFC set to  0.000000
2/24/2012	2:54:03 PM	SiCl4 MFC set to  0.000000
2/24/2012	2:54:03 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:54:04 PM	Tube furnace set to 0
2/24/2012	2:54:07 PM	Helium valve closed
2/24/2012	2:54:07 PM	H2 valve closed
2/24/2012	2:54:07 PM	BCl3 valve closed
2/24/2012	2:54:07 PM	PH3 valve closed
2/24/2012	2:54:07 PM	SiCl4 pre valve closed
2/24/2012	2:54:07 PM	SiCl4 post valve closed
2/24/2012	2:54:07 PM	Main Vac valve closed
2/24/2012	2:54:07 PM	Bypass valve closed
2/24/2012	2:54:07 PM	Bubbler valve closed
2/24/2012	2:54:07 PM	Helium MFC set to  0.000000
2/24/2012	2:54:07 PM	H2 MFC set to  0.000000
2/24/2012	2:54:07 PM	BCl3 MFC set to  0.000000
2/24/2012	2:54:07 PM	PH3 MFC set to  0.000000
2/24/2012	2:54:07 PM	SiCl4 MFC set to  0.000000
2/24/2012	2:54:07 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:54:07 PM	Tube furnace set to 0
2/24/2012	2:54:08 PM	Run finished at 2:54 PM
2/24/2012	2:54:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	2:57:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	2:57:27 PM	Recipe started at 2:57 PM
2/24/2012	2:57:27 PM	Helium valve closed
2/24/2012	2:57:27 PM	H2 valve closed
2/24/2012	2:57:27 PM	BCl3 valve closed
2/24/2012	2:57:27 PM	PH3 valve closed
2/24/2012	2:57:27 PM	SiCl4 pre valve closed
2/24/2012	2:57:27 PM	SiCl4 post valve closed
2/24/2012	2:57:27 PM	Main Vac valve closed
2/24/2012	2:57:27 PM	Bubbler valve closed
2/24/2012	2:57:27 PM	Bypass valve opened
2/24/2012	2:57:27 PM	Helium MFC set to  0.000000
2/24/2012	2:57:27 PM	H2 MFC set to  0.000000
2/24/2012	2:57:27 PM	BCl3 MFC set to  0.000000
2/24/2012	2:57:27 PM	PH3 MFC set to  0.000000
2/24/2012	2:57:27 PM	SiCl4 MFC set to  0.000000
2/24/2012	2:57:27 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:57:27 PM	Tube furnace set to 0
2/24/2012	2:58:28 PM	Helium valve closed
2/24/2012	2:58:28 PM	H2 valve closed
2/24/2012	2:58:28 PM	BCl3 valve closed
2/24/2012	2:58:28 PM	PH3 valve closed
2/24/2012	2:58:28 PM	SiCl4 pre valve closed
2/24/2012	2:58:28 PM	SiCl4 post valve closed
2/24/2012	2:58:28 PM	Main Vac valve closed
2/24/2012	2:58:28 PM	Bubbler valve closed
2/24/2012	2:58:28 PM	Bypass valve opened
2/24/2012	2:58:28 PM	Helium MFC set to  0.000000
2/24/2012	2:58:28 PM	H2 MFC set to  0.000000
2/24/2012	2:58:28 PM	BCl3 MFC set to  0.000000
2/24/2012	2:58:28 PM	PH3 MFC set to  0.000000
2/24/2012	2:58:28 PM	SiCl4 MFC set to  0.000000
2/24/2012	2:58:28 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:58:28 PM	Tube furnace set to 0
2/24/2012	2:59:28 PM	Helium valve closed
2/24/2012	2:59:28 PM	H2 valve closed
2/24/2012	2:59:28 PM	BCl3 valve closed
2/24/2012	2:59:28 PM	PH3 valve closed
2/24/2012	2:59:28 PM	SiCl4 pre valve closed
2/24/2012	2:59:28 PM	SiCl4 post valve closed
2/24/2012	2:59:28 PM	Bypass valve closed
2/24/2012	2:59:28 PM	Bubbler valve closed
2/24/2012	2:59:28 PM	Main Vac valve opened
2/24/2012	2:59:28 PM	Helium MFC set to  0.000000
2/24/2012	2:59:28 PM	H2 MFC set to  0.000000
2/24/2012	2:59:28 PM	BCl3 MFC set to  0.000000
2/24/2012	2:59:28 PM	PH3 MFC set to  0.000000
2/24/2012	2:59:28 PM	SiCl4 MFC set to  0.000000
2/24/2012	2:59:28 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	2:59:29 PM	Tube furnace set to 0
2/24/2012	2:59:30 PM	Run finished at 2:59 PM
2/24/2012	2:59:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	3:23:00 PM	Main Vac valve closed
2/24/2012	3:23:21 PM	Main Vac valve opened
2/24/2012	3:23:48 PM	Recipe started at 3:23 PM
2/24/2012	3:23:48 PM	Helium valve closed
2/24/2012	3:23:48 PM	H2 valve closed
2/24/2012	3:23:48 PM	BCl3 valve closed
2/24/2012	3:23:48 PM	PH3 valve closed
2/24/2012	3:23:48 PM	SiCl4 pre valve closed
2/24/2012	3:23:48 PM	SiCl4 post valve closed
2/24/2012	3:23:48 PM	Main Vac valve closed
2/24/2012	3:23:48 PM	Bypass valve closed
2/24/2012	3:23:48 PM	Bubbler valve closed
2/24/2012	3:23:48 PM	Helium MFC set to  0.000000
2/24/2012	3:23:48 PM	H2 MFC set to  0.000000
2/24/2012	3:23:48 PM	BCl3 MFC set to  0.000000
2/24/2012	3:23:48 PM	PH3 MFC set to  0.000000
2/24/2012	3:23:48 PM	SiCl4 MFC set to  0.000000
2/24/2012	3:23:48 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	3:23:48 PM	Tube furnace set to 0
2/24/2012	3:23:51 PM	Helium valve closed
2/24/2012	3:23:51 PM	BCl3 valve closed
2/24/2012	3:23:51 PM	PH3 valve closed
2/24/2012	3:23:51 PM	SiCl4 pre valve closed
2/24/2012	3:23:51 PM	SiCl4 post valve closed
2/24/2012	3:23:51 PM	Main Vac valve closed
2/24/2012	3:23:51 PM	Bypass valve closed
2/24/2012	3:23:51 PM	Bubbler valve closed
2/24/2012	3:23:51 PM	H2 valve opened
2/24/2012	3:23:51 PM	Helium MFC set to  0.000000
2/24/2012	3:23:51 PM	H2 MFC set to  500.000000
2/24/2012	3:23:51 PM	BCl3 MFC set to  0.000000
2/24/2012	3:23:51 PM	PH3 MFC set to  0.000000
2/24/2012	3:23:51 PM	SiCl4 MFC set to  0.000000
2/24/2012	3:23:51 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	3:23:52 PM	Tube furnace set to 0
2/24/2012	3:24:58 PM	Helium valve closed
2/24/2012	3:24:58 PM	BCl3 valve closed
2/24/2012	3:24:58 PM	PH3 valve closed
2/24/2012	3:24:58 PM	SiCl4 pre valve closed
2/24/2012	3:24:58 PM	SiCl4 post valve closed
2/24/2012	3:24:58 PM	Main Vac valve closed
2/24/2012	3:24:58 PM	Bypass valve closed
2/24/2012	3:24:58 PM	H2 valve opened
2/24/2012	3:24:58 PM	Bubbler valve opened
2/24/2012	3:24:58 PM	Helium MFC set to  0.000000
2/24/2012	3:24:58 PM	H2 MFC set to  500.000000
2/24/2012	3:24:58 PM	BCl3 MFC set to  0.000000
2/24/2012	3:24:58 PM	PH3 MFC set to  0.000000
2/24/2012	3:24:58 PM	SiCl4 MFC set to  0.000000
2/24/2012	3:24:58 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	3:24:59 PM	Tube furnace set to 0
2/24/2012	3:25:00 PM	Helium valve closed
2/24/2012	3:25:00 PM	BCl3 valve closed
2/24/2012	3:25:00 PM	PH3 valve closed
2/24/2012	3:25:00 PM	SiCl4 pre valve closed
2/24/2012	3:25:00 PM	SiCl4 post valve closed
2/24/2012	3:25:00 PM	Main Vac valve closed
2/24/2012	3:25:00 PM	Bypass valve closed
2/24/2012	3:25:00 PM	H2 valve opened
2/24/2012	3:25:00 PM	Bubbler valve opened
2/24/2012	3:25:00 PM	Helium MFC set to  0.000000
2/24/2012	3:25:00 PM	H2 MFC set to  500.000000
2/24/2012	3:25:00 PM	BCl3 MFC set to  0.000000
2/24/2012	3:25:00 PM	PH3 MFC set to  0.000000
2/24/2012	3:25:00 PM	SiCl4 MFC set to  0.000000
2/24/2012	3:25:00 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	3:25:00 PM	Tube furnace set to 1000
2/24/2012	3:45:00 PM	Helium valve closed
2/24/2012	3:45:00 PM	BCl3 valve closed
2/24/2012	3:45:00 PM	Main Vac valve closed
2/24/2012	3:45:00 PM	Bypass valve closed
2/24/2012	3:45:00 PM	H2 valve opened
2/24/2012	3:45:00 PM	PH3 valve opened
2/24/2012	3:45:00 PM	SiCl4 pre valve opened
2/24/2012	3:45:00 PM	SiCl4 post valve opened
2/24/2012	3:45:00 PM	Bubbler valve opened
2/24/2012	3:45:00 PM	Helium MFC set to  0.000000
2/24/2012	3:45:00 PM	H2 MFC set to  500.000000
2/24/2012	3:45:00 PM	BCl3 MFC set to  0.000000
2/24/2012	3:45:00 PM	PH3 MFC set to  0.300000
2/24/2012	3:45:00 PM	SiCl4 MFC set to  25.000000
2/24/2012	3:45:00 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	3:45:00 PM	Tube furnace set to 1000
2/24/2012	3:54:00 PM	Helium valve closed
2/24/2012	3:54:00 PM	BCl3 valve closed
2/24/2012	3:54:00 PM	PH3 valve closed
2/24/2012	3:54:00 PM	SiCl4 pre valve closed
2/24/2012	3:54:00 PM	SiCl4 post valve closed
2/24/2012	3:54:00 PM	Main Vac valve closed
2/24/2012	3:54:00 PM	Bypass valve closed
2/24/2012	3:54:00 PM	H2 valve opened
2/24/2012	3:54:00 PM	Bubbler valve opened
2/24/2012	3:54:00 PM	Helium MFC set to  0.000000
2/24/2012	3:54:00 PM	H2 MFC set to  500.000000
2/24/2012	3:54:00 PM	BCl3 MFC set to  0.000000
2/24/2012	3:54:00 PM	PH3 MFC set to  0.000000
2/24/2012	3:54:00 PM	SiCl4 MFC set to  0.000000
2/24/2012	3:54:00 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	3:54:00 PM	Tube furnace set to 750
2/24/2012	3:59:00 PM	H2 valve closed
2/24/2012	3:59:00 PM	BCl3 valve closed
2/24/2012	3:59:00 PM	PH3 valve closed
2/24/2012	3:59:00 PM	SiCl4 pre valve closed
2/24/2012	3:59:00 PM	SiCl4 post valve closed
2/24/2012	3:59:00 PM	Main Vac valve closed
2/24/2012	3:59:00 PM	Bypass valve closed
2/24/2012	3:59:00 PM	Helium valve opened
2/24/2012	3:59:00 PM	Bubbler valve opened
2/24/2012	3:59:00 PM	Helium MFC set to  500.000000
2/24/2012	3:59:00 PM	H2 MFC set to  0.000000
2/24/2012	3:59:00 PM	BCl3 MFC set to  0.000000
2/24/2012	3:59:00 PM	PH3 MFC set to  0.000000
2/24/2012	3:59:00 PM	SiCl4 MFC set to  0.000000
2/24/2012	3:59:00 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	3:59:00 PM	Tube furnace set to 0
2/24/2012	4:19:00 PM	Helium valve closed
2/24/2012	4:19:00 PM	H2 valve closed
2/24/2012	4:19:00 PM	BCl3 valve closed
2/24/2012	4:19:00 PM	PH3 valve closed
2/24/2012	4:19:00 PM	SiCl4 pre valve closed
2/24/2012	4:19:00 PM	SiCl4 post valve closed
2/24/2012	4:19:00 PM	Main Vac valve closed
2/24/2012	4:19:00 PM	Bypass valve closed
2/24/2012	4:19:00 PM	Bubbler valve closed
2/24/2012	4:19:00 PM	Helium MFC set to  0.000000
2/24/2012	4:19:00 PM	H2 MFC set to  0.000000
2/24/2012	4:19:00 PM	BCl3 MFC set to  0.000000
2/24/2012	4:19:00 PM	PH3 MFC set to  0.000000
2/24/2012	4:19:00 PM	SiCl4 MFC set to  0.000000
2/24/2012	4:19:00 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	4:19:00 PM	Tube furnace set to 0
2/24/2012	4:19:01 PM	Run finished at 4:19 PM
2/24/2012	5:26:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	5:26:15 PM	Recipe started at 5:26 PM
2/24/2012	5:26:15 PM	Helium valve closed
2/24/2012	5:26:15 PM	H2 valve closed
2/24/2012	5:26:15 PM	BCl3 valve closed
2/24/2012	5:26:15 PM	PH3 valve closed
2/24/2012	5:26:15 PM	SiCl4 pre valve closed
2/24/2012	5:26:15 PM	SiCl4 post valve closed
2/24/2012	5:26:15 PM	Main Vac valve closed
2/24/2012	5:26:15 PM	Bypass valve closed
2/24/2012	5:26:15 PM	Bubbler valve closed
2/24/2012	5:26:15 PM	Helium MFC set to  0.000000
2/24/2012	5:26:15 PM	H2 MFC set to  0.000000
2/24/2012	5:26:15 PM	BCl3 MFC set to  0.000000
2/24/2012	5:26:15 PM	PH3 MFC set to  0.000000
2/24/2012	5:26:15 PM	SiCl4 MFC set to  0.000000
2/24/2012	5:26:15 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	5:26:15 PM	Tube furnace set to 0
2/24/2012	5:26:18 PM	H2 valve closed
2/24/2012	5:26:18 PM	BCl3 valve closed
2/24/2012	5:26:18 PM	PH3 valve closed
2/24/2012	5:26:18 PM	SiCl4 pre valve closed
2/24/2012	5:26:18 PM	SiCl4 post valve closed
2/24/2012	5:26:18 PM	Main Vac valve closed
2/24/2012	5:26:18 PM	Bypass valve closed
2/24/2012	5:26:18 PM	Bubbler valve closed
2/24/2012	5:26:18 PM	Helium valve opened
2/24/2012	5:26:18 PM	Helium MFC set to  500.000000
2/24/2012	5:26:18 PM	H2 MFC set to  0.000000
2/24/2012	5:26:18 PM	BCl3 MFC set to  0.000000
2/24/2012	5:26:18 PM	PH3 MFC set to  0.000000
2/24/2012	5:26:18 PM	SiCl4 MFC set to  0.000000
2/24/2012	5:26:18 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	5:26:18 PM	Tube furnace set to 0
2/24/2012	5:26:21 PM	Helium valve closed
2/24/2012	5:26:22 PM	H2 valve closed
2/24/2012	5:26:22 PM	BCl3 valve closed
2/24/2012	5:26:22 PM	PH3 valve closed
2/24/2012	5:26:22 PM	SiCl4 pre valve closed
2/24/2012	5:26:22 PM	SiCl4 post valve closed
2/24/2012	5:26:22 PM	Main Vac valve closed
2/24/2012	5:26:22 PM	Bypass valve closed
2/24/2012	5:26:22 PM	Bubbler valve closed
2/24/2012	5:26:22 PM	Helium MFC set to  0.000000
2/24/2012	5:26:22 PM	H2 MFC set to  0.000000
2/24/2012	5:26:22 PM	BCl3 MFC set to  0.000000
2/24/2012	5:26:22 PM	PH3 MFC set to  0.000000
2/24/2012	5:26:22 PM	SiCl4 MFC set to  0.000000
2/24/2012	5:26:22 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	5:26:22 PM	Tube furnace set to 0
2/24/2012	5:26:23 PM	Run finished at 5:26 PM
2/24/2012	5:26:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	5:32:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	5:32:21 PM	Recipe started at 5:32 PM
2/24/2012	5:32:21 PM	Helium valve closed
2/24/2012	5:32:21 PM	H2 valve closed
2/24/2012	5:32:21 PM	BCl3 valve closed
2/24/2012	5:32:21 PM	PH3 valve closed
2/24/2012	5:32:21 PM	SiCl4 pre valve closed
2/24/2012	5:32:21 PM	SiCl4 post valve closed
2/24/2012	5:32:21 PM	Main Vac valve closed
2/24/2012	5:32:21 PM	Bubbler valve closed
2/24/2012	5:32:21 PM	Bypass valve opened
2/24/2012	5:32:21 PM	Helium MFC set to  0.000000
2/24/2012	5:32:21 PM	H2 MFC set to  0.000000
2/24/2012	5:32:21 PM	BCl3 MFC set to  0.000000
2/24/2012	5:32:21 PM	PH3 MFC set to  0.000000
2/24/2012	5:32:21 PM	SiCl4 MFC set to  0.000000
2/24/2012	5:32:21 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	5:32:22 PM	Tube furnace set to 0
2/24/2012	5:33:25 PM	Helium valve closed
2/24/2012	5:33:25 PM	H2 valve closed
2/24/2012	5:33:25 PM	BCl3 valve closed
2/24/2012	5:33:25 PM	PH3 valve closed
2/24/2012	5:33:25 PM	SiCl4 pre valve closed
2/24/2012	5:33:25 PM	SiCl4 post valve closed
2/24/2012	5:33:25 PM	Main Vac valve closed
2/24/2012	5:33:25 PM	Bubbler valve closed
2/24/2012	5:33:25 PM	Bypass valve opened
2/24/2012	5:33:25 PM	Helium MFC set to  0.000000
2/24/2012	5:33:25 PM	H2 MFC set to  0.000000
2/24/2012	5:33:25 PM	BCl3 MFC set to  0.000000
2/24/2012	5:33:25 PM	PH3 MFC set to  0.000000
2/24/2012	5:33:25 PM	SiCl4 MFC set to  0.000000
2/24/2012	5:33:25 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	5:33:25 PM	Tube furnace set to 0
2/24/2012	5:34:25 PM	Helium valve closed
2/24/2012	5:34:25 PM	H2 valve closed
2/24/2012	5:34:25 PM	BCl3 valve closed
2/24/2012	5:34:25 PM	PH3 valve closed
2/24/2012	5:34:26 PM	SiCl4 pre valve closed
2/24/2012	5:34:26 PM	SiCl4 post valve closed
2/24/2012	5:34:26 PM	Bypass valve closed
2/24/2012	5:34:26 PM	Bubbler valve closed
2/24/2012	5:34:26 PM	Main Vac valve opened
2/24/2012	5:34:26 PM	Helium MFC set to  0.000000
2/24/2012	5:34:26 PM	H2 MFC set to  0.000000
2/24/2012	5:34:26 PM	BCl3 MFC set to  0.000000
2/24/2012	5:34:26 PM	PH3 MFC set to  0.000000
2/24/2012	5:34:26 PM	SiCl4 MFC set to  0.000000
2/24/2012	5:34:26 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	5:34:26 PM	Tube furnace set to 0
2/24/2012	5:34:27 PM	Run finished at 5:34 PM
2/24/2012	5:34:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:01:29 PM	Main Vac valve closed
2/24/2012	7:01:55 PM	Main Vac valve opened
2/24/2012	7:02:34 PM	Recipe started at 7:02 PM
2/24/2012	7:02:34 PM	Helium valve closed
2/24/2012	7:02:34 PM	H2 valve closed
2/24/2012	7:02:34 PM	BCl3 valve closed
2/24/2012	7:02:34 PM	PH3 valve closed
2/24/2012	7:02:34 PM	SiCl4 pre valve closed
2/24/2012	7:02:34 PM	SiCl4 post valve closed
2/24/2012	7:02:34 PM	Main Vac valve closed
2/24/2012	7:02:34 PM	Bypass valve closed
2/24/2012	7:02:34 PM	Bubbler valve closed
2/24/2012	7:02:34 PM	Helium MFC set to  0.000000
2/24/2012	7:02:34 PM	H2 MFC set to  0.000000
2/24/2012	7:02:34 PM	BCl3 MFC set to  0.000000
2/24/2012	7:02:34 PM	PH3 MFC set to  0.000000
2/24/2012	7:02:34 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:02:34 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:02:35 PM	Tube furnace set to 0
2/24/2012	7:02:38 PM	Helium valve closed
2/24/2012	7:02:38 PM	BCl3 valve closed
2/24/2012	7:02:38 PM	PH3 valve closed
2/24/2012	7:02:38 PM	SiCl4 pre valve closed
2/24/2012	7:02:38 PM	SiCl4 post valve closed
2/24/2012	7:02:38 PM	Main Vac valve closed
2/24/2012	7:02:38 PM	Bypass valve closed
2/24/2012	7:02:38 PM	Bubbler valve closed
2/24/2012	7:02:38 PM	H2 valve opened
2/24/2012	7:02:38 PM	Helium MFC set to  0.000000
2/24/2012	7:02:38 PM	H2 MFC set to  500.000000
2/24/2012	7:02:38 PM	BCl3 MFC set to  0.000000
2/24/2012	7:02:38 PM	PH3 MFC set to  0.000000
2/24/2012	7:02:38 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:02:38 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:02:38 PM	Tube furnace set to 0
2/24/2012	7:03:44 PM	Helium valve closed
2/24/2012	7:03:44 PM	BCl3 valve closed
2/24/2012	7:03:44 PM	PH3 valve closed
2/24/2012	7:03:44 PM	SiCl4 pre valve closed
2/24/2012	7:03:44 PM	SiCl4 post valve closed
2/24/2012	7:03:44 PM	Main Vac valve closed
2/24/2012	7:03:44 PM	Bypass valve closed
2/24/2012	7:03:44 PM	H2 valve opened
2/24/2012	7:03:44 PM	Bubbler valve opened
2/24/2012	7:03:44 PM	Helium MFC set to  0.000000
2/24/2012	7:03:44 PM	H2 MFC set to  500.000000
2/24/2012	7:03:44 PM	BCl3 MFC set to  0.000000
2/24/2012	7:03:44 PM	PH3 MFC set to  0.000000
2/24/2012	7:03:44 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:03:44 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:03:44 PM	Tube furnace set to 0
2/24/2012	7:03:45 PM	Helium valve closed
2/24/2012	7:03:45 PM	BCl3 valve closed
2/24/2012	7:03:45 PM	PH3 valve closed
2/24/2012	7:03:45 PM	SiCl4 pre valve closed
2/24/2012	7:03:45 PM	SiCl4 post valve closed
2/24/2012	7:03:45 PM	Main Vac valve closed
2/24/2012	7:03:45 PM	Bypass valve closed
2/24/2012	7:03:45 PM	H2 valve opened
2/24/2012	7:03:45 PM	Bubbler valve opened
2/24/2012	7:03:45 PM	Helium MFC set to  0.000000
2/24/2012	7:03:45 PM	H2 MFC set to  500.000000
2/24/2012	7:03:45 PM	BCl3 MFC set to  0.000000
2/24/2012	7:03:45 PM	PH3 MFC set to  0.000000
2/24/2012	7:03:45 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:03:45 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:03:45 PM	Tube furnace set to 1000
2/24/2012	7:23:45 PM	Helium valve closed
2/24/2012	7:23:45 PM	BCl3 valve closed
2/24/2012	7:23:45 PM	Main Vac valve closed
2/24/2012	7:23:45 PM	Bypass valve closed
2/24/2012	7:23:45 PM	H2 valve opened
2/24/2012	7:23:45 PM	PH3 valve opened
2/24/2012	7:23:45 PM	SiCl4 pre valve opened
2/24/2012	7:23:45 PM	SiCl4 post valve opened
2/24/2012	7:23:45 PM	Bubbler valve opened
2/24/2012	7:23:45 PM	Helium MFC set to  0.000000
2/24/2012	7:23:45 PM	H2 MFC set to  500.000000
2/24/2012	7:23:45 PM	BCl3 MFC set to  0.000000
2/24/2012	7:23:45 PM	PH3 MFC set to  0.300000
2/24/2012	7:23:45 PM	SiCl4 MFC set to  25.000000
2/24/2012	7:23:45 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:23:45 PM	Tube furnace set to 1000
2/24/2012	7:32:45 PM	Helium valve closed
2/24/2012	7:32:45 PM	BCl3 valve closed
2/24/2012	7:32:45 PM	PH3 valve closed
2/24/2012	7:32:45 PM	SiCl4 pre valve closed
2/24/2012	7:32:45 PM	SiCl4 post valve closed
2/24/2012	7:32:45 PM	Main Vac valve closed
2/24/2012	7:32:45 PM	Bypass valve closed
2/24/2012	7:32:45 PM	H2 valve opened
2/24/2012	7:32:45 PM	Bubbler valve opened
2/24/2012	7:32:45 PM	Helium MFC set to  0.000000
2/24/2012	7:32:45 PM	H2 MFC set to  500.000000
2/24/2012	7:32:45 PM	BCl3 MFC set to  0.000000
2/24/2012	7:32:45 PM	PH3 MFC set to  0.000000
2/24/2012	7:32:45 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:32:45 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:32:45 PM	Tube furnace set to 750
2/24/2012	7:37:45 PM	H2 valve closed
2/24/2012	7:37:45 PM	BCl3 valve closed
2/24/2012	7:37:45 PM	PH3 valve closed
2/24/2012	7:37:45 PM	SiCl4 pre valve closed
2/24/2012	7:37:45 PM	SiCl4 post valve closed
2/24/2012	7:37:45 PM	Main Vac valve closed
2/24/2012	7:37:45 PM	Bypass valve closed
2/24/2012	7:37:45 PM	Helium valve opened
2/24/2012	7:37:45 PM	Bubbler valve opened
2/24/2012	7:37:45 PM	Helium MFC set to  500.000000
2/24/2012	7:37:45 PM	H2 MFC set to  0.000000
2/24/2012	7:37:45 PM	BCl3 MFC set to  0.000000
2/24/2012	7:37:45 PM	PH3 MFC set to  0.000000
2/24/2012	7:37:45 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:37:45 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:37:46 PM	Tube furnace set to 0
2/24/2012	7:52:33 PM	Helium valve closed
2/24/2012	7:52:33 PM	H2 valve closed
2/24/2012	7:52:33 PM	BCl3 valve closed
2/24/2012	7:52:33 PM	PH3 valve closed
2/24/2012	7:52:33 PM	SiCl4 pre valve closed
2/24/2012	7:52:33 PM	SiCl4 post valve closed
2/24/2012	7:52:33 PM	Main Vac valve closed
2/24/2012	7:52:33 PM	Bypass valve closed
2/24/2012	7:52:33 PM	Bubbler valve closed
2/24/2012	7:52:33 PM	Helium MFC set to  0.000000
2/24/2012	7:52:33 PM	H2 MFC set to  0.000000
2/24/2012	7:52:33 PM	BCl3 MFC set to  0.000000
2/24/2012	7:52:33 PM	PH3 MFC set to  0.000000
2/24/2012	7:52:33 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:52:33 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:52:33 PM	Tube furnace set to 0
2/24/2012	7:52:34 PM	Run finished at 7:52 PM
2/24/2012	7:54:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:54:52 PM	Recipe started at 7:54 PM
2/24/2012	7:54:52 PM	Helium valve closed
2/24/2012	7:54:52 PM	H2 valve closed
2/24/2012	7:54:52 PM	BCl3 valve closed
2/24/2012	7:54:52 PM	PH3 valve closed
2/24/2012	7:54:52 PM	SiCl4 pre valve closed
2/24/2012	7:54:52 PM	SiCl4 post valve closed
2/24/2012	7:54:52 PM	Main Vac valve closed
2/24/2012	7:54:52 PM	Bubbler valve closed
2/24/2012	7:54:52 PM	Bypass valve opened
2/24/2012	7:54:52 PM	Helium MFC set to  0.000000
2/24/2012	7:54:52 PM	H2 MFC set to  0.000000
2/24/2012	7:54:52 PM	BCl3 MFC set to  0.000000
2/24/2012	7:54:52 PM	PH3 MFC set to  0.000000
2/24/2012	7:54:52 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:54:52 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:54:52 PM	Tube furnace set to 0
2/24/2012	7:55:51 PM	Helium valve closed
2/24/2012	7:55:51 PM	H2 valve closed
2/24/2012	7:55:51 PM	BCl3 valve closed
2/24/2012	7:55:51 PM	PH3 valve closed
2/24/2012	7:55:51 PM	SiCl4 pre valve closed
2/24/2012	7:55:51 PM	SiCl4 post valve closed
2/24/2012	7:55:51 PM	Main Vac valve closed
2/24/2012	7:55:51 PM	Bubbler valve closed
2/24/2012	7:55:51 PM	Bypass valve opened
2/24/2012	7:55:51 PM	Helium MFC set to  0.000000
2/24/2012	7:55:51 PM	H2 MFC set to  0.000000
2/24/2012	7:55:51 PM	BCl3 MFC set to  0.000000
2/24/2012	7:55:51 PM	PH3 MFC set to  0.000000
2/24/2012	7:55:51 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:55:51 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:55:52 PM	Tube furnace set to 0
2/24/2012	7:56:52 PM	Helium valve closed
2/24/2012	7:56:52 PM	H2 valve closed
2/24/2012	7:56:52 PM	BCl3 valve closed
2/24/2012	7:56:52 PM	PH3 valve closed
2/24/2012	7:56:52 PM	SiCl4 pre valve closed
2/24/2012	7:56:52 PM	SiCl4 post valve closed
2/24/2012	7:56:52 PM	Bypass valve closed
2/24/2012	7:56:52 PM	Bubbler valve closed
2/24/2012	7:56:52 PM	Main Vac valve opened
2/24/2012	7:56:52 PM	Helium MFC set to  0.000000
2/24/2012	7:56:52 PM	H2 MFC set to  0.000000
2/24/2012	7:56:52 PM	BCl3 MFC set to  0.000000
2/24/2012	7:56:52 PM	PH3 MFC set to  0.000000
2/24/2012	7:56:52 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:56:52 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:56:52 PM	Tube furnace set to 0
2/24/2012	7:56:53 PM	Run finished at 7:56 PM
2/24/2012	7:56:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	7:58:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/24/2012	7:59:09 PM	Recipe started at 7:59 PM
2/24/2012	7:59:09 PM	Helium valve closed
2/24/2012	7:59:09 PM	H2 valve closed
2/24/2012	7:59:09 PM	BCl3 valve closed
2/24/2012	7:59:09 PM	PH3 valve closed
2/24/2012	7:59:09 PM	SiCl4 pre valve closed
2/24/2012	7:59:09 PM	SiCl4 post valve closed
2/24/2012	7:59:09 PM	Main Vac valve closed
2/24/2012	7:59:09 PM	Bubbler valve closed
2/24/2012	7:59:09 PM	Bypass valve opened
2/24/2012	7:59:09 PM	Helium MFC set to  0.000000
2/24/2012	7:59:09 PM	H2 MFC set to  0.000000
2/24/2012	7:59:09 PM	BCl3 MFC set to  0.000000
2/24/2012	7:59:09 PM	PH3 MFC set to  0.000000
2/24/2012	7:59:09 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:59:09 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:59:09 PM	Tube furnace set to 0
2/24/2012	7:59:10 PM	Helium valve closed
2/24/2012	7:59:10 PM	H2 valve closed
2/24/2012	7:59:10 PM	BCl3 valve closed
2/24/2012	7:59:10 PM	PH3 valve closed
2/24/2012	7:59:10 PM	SiCl4 pre valve closed
2/24/2012	7:59:10 PM	SiCl4 post valve closed
2/24/2012	7:59:10 PM	Main Vac valve closed
2/24/2012	7:59:10 PM	Bubbler valve closed
2/24/2012	7:59:10 PM	Bypass valve opened
2/24/2012	7:59:10 PM	Helium MFC set to  0.000000
2/24/2012	7:59:10 PM	H2 MFC set to  0.000000
2/24/2012	7:59:10 PM	BCl3 MFC set to  0.000000
2/24/2012	7:59:10 PM	PH3 MFC set to  0.000000
2/24/2012	7:59:10 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:59:10 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:59:10 PM	Tube furnace set to 0
2/24/2012	7:59:10 PM	Helium valve closed
2/24/2012	7:59:10 PM	H2 valve closed
2/24/2012	7:59:10 PM	BCl3 valve closed
2/24/2012	7:59:10 PM	PH3 valve closed
2/24/2012	7:59:10 PM	SiCl4 pre valve closed
2/24/2012	7:59:10 PM	SiCl4 post valve closed
2/24/2012	7:59:10 PM	Bypass valve closed
2/24/2012	7:59:10 PM	Bubbler valve closed
2/24/2012	7:59:10 PM	Main Vac valve opened
2/24/2012	7:59:10 PM	Helium MFC set to  0.000000
2/24/2012	7:59:10 PM	H2 MFC set to  0.000000
2/24/2012	7:59:10 PM	BCl3 MFC set to  0.000000
2/24/2012	7:59:10 PM	PH3 MFC set to  0.000000
2/24/2012	7:59:10 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:59:10 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:59:10 PM	Tube furnace set to 0
2/24/2012	7:59:40 PM	H2 valve closed
2/24/2012	7:59:40 PM	BCl3 valve closed
2/24/2012	7:59:40 PM	PH3 valve closed
2/24/2012	7:59:40 PM	SiCl4 pre valve closed
2/24/2012	7:59:40 PM	SiCl4 post valve closed
2/24/2012	7:59:40 PM	Bypass valve closed
2/24/2012	7:59:40 PM	Bubbler valve closed
2/24/2012	7:59:40 PM	Helium valve opened
2/24/2012	7:59:40 PM	Main Vac valve opened
2/24/2012	7:59:40 PM	Helium MFC set to  20.000000
2/24/2012	7:59:40 PM	H2 MFC set to  0.000000
2/24/2012	7:59:40 PM	BCl3 MFC set to  0.000000
2/24/2012	7:59:40 PM	PH3 MFC set to  0.000000
2/24/2012	7:59:40 PM	SiCl4 MFC set to  0.000000
2/24/2012	7:59:40 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	7:59:41 PM	Tube furnace set to 0
2/24/2012	8:00:11 PM	Helium valve closed
2/24/2012	8:00:11 PM	H2 valve closed
2/24/2012	8:00:11 PM	BCl3 valve closed
2/24/2012	8:00:11 PM	PH3 valve closed
2/24/2012	8:00:11 PM	SiCl4 pre valve closed
2/24/2012	8:00:11 PM	SiCl4 post valve closed
2/24/2012	8:00:11 PM	Bypass valve closed
2/24/2012	8:00:11 PM	Bubbler valve closed
2/24/2012	8:00:11 PM	Main Vac valve opened
2/24/2012	8:00:11 PM	Helium MFC set to  0.000000
2/24/2012	8:00:11 PM	H2 MFC set to  0.000000
2/24/2012	8:00:11 PM	BCl3 MFC set to  0.000000
2/24/2012	8:00:11 PM	PH3 MFC set to  0.000000
2/24/2012	8:00:11 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:00:11 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:00:11 PM	Tube furnace set to 0
2/24/2012	8:00:41 PM	H2 valve closed
2/24/2012	8:00:41 PM	BCl3 valve closed
2/24/2012	8:00:41 PM	PH3 valve closed
2/24/2012	8:00:41 PM	SiCl4 pre valve closed
2/24/2012	8:00:41 PM	SiCl4 post valve closed
2/24/2012	8:00:41 PM	Bypass valve closed
2/24/2012	8:00:41 PM	Bubbler valve closed
2/24/2012	8:00:41 PM	Helium valve opened
2/24/2012	8:00:41 PM	Main Vac valve opened
2/24/2012	8:00:41 PM	Helium MFC set to  20.000000
2/24/2012	8:00:41 PM	H2 MFC set to  0.000000
2/24/2012	8:00:41 PM	BCl3 MFC set to  0.000000
2/24/2012	8:00:41 PM	PH3 MFC set to  0.000000
2/24/2012	8:00:41 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:00:41 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:00:41 PM	Tube furnace set to 0
2/24/2012	8:01:11 PM	Helium valve closed
2/24/2012	8:01:11 PM	H2 valve closed
2/24/2012	8:01:11 PM	BCl3 valve closed
2/24/2012	8:01:11 PM	PH3 valve closed
2/24/2012	8:01:11 PM	SiCl4 pre valve closed
2/24/2012	8:01:11 PM	SiCl4 post valve closed
2/24/2012	8:01:11 PM	Bypass valve closed
2/24/2012	8:01:11 PM	Bubbler valve closed
2/24/2012	8:01:11 PM	Main Vac valve opened
2/24/2012	8:01:11 PM	Helium MFC set to  0.000000
2/24/2012	8:01:11 PM	H2 MFC set to  0.000000
2/24/2012	8:01:11 PM	BCl3 MFC set to  0.000000
2/24/2012	8:01:11 PM	PH3 MFC set to  0.000000
2/24/2012	8:01:11 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:01:11 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:01:11 PM	Tube furnace set to 0
2/24/2012	8:01:41 PM	H2 valve closed
2/24/2012	8:01:41 PM	BCl3 valve closed
2/24/2012	8:01:41 PM	PH3 valve closed
2/24/2012	8:01:41 PM	SiCl4 pre valve closed
2/24/2012	8:01:41 PM	SiCl4 post valve closed
2/24/2012	8:01:41 PM	Bypass valve closed
2/24/2012	8:01:41 PM	Bubbler valve closed
2/24/2012	8:01:41 PM	Helium valve opened
2/24/2012	8:01:41 PM	Main Vac valve opened
2/24/2012	8:01:41 PM	Helium MFC set to  20.000000
2/24/2012	8:01:41 PM	H2 MFC set to  0.000000
2/24/2012	8:01:41 PM	BCl3 MFC set to  0.000000
2/24/2012	8:01:41 PM	PH3 MFC set to  0.000000
2/24/2012	8:01:41 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:01:41 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:01:41 PM	Tube furnace set to 0
2/24/2012	8:02:11 PM	Helium valve closed
2/24/2012	8:02:11 PM	H2 valve closed
2/24/2012	8:02:11 PM	BCl3 valve closed
2/24/2012	8:02:11 PM	PH3 valve closed
2/24/2012	8:02:11 PM	SiCl4 pre valve closed
2/24/2012	8:02:11 PM	SiCl4 post valve closed
2/24/2012	8:02:11 PM	Bypass valve closed
2/24/2012	8:02:11 PM	Bubbler valve closed
2/24/2012	8:02:11 PM	Main Vac valve opened
2/24/2012	8:02:11 PM	Helium MFC set to  0.000000
2/24/2012	8:02:11 PM	H2 MFC set to  0.000000
2/24/2012	8:02:11 PM	BCl3 MFC set to  0.000000
2/24/2012	8:02:11 PM	PH3 MFC set to  0.000000
2/24/2012	8:02:11 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:02:11 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:02:12 PM	Tube furnace set to 0
2/24/2012	8:02:42 PM	H2 valve closed
2/24/2012	8:02:42 PM	BCl3 valve closed
2/24/2012	8:02:42 PM	PH3 valve closed
2/24/2012	8:02:42 PM	SiCl4 pre valve closed
2/24/2012	8:02:42 PM	SiCl4 post valve closed
2/24/2012	8:02:42 PM	Bypass valve closed
2/24/2012	8:02:42 PM	Bubbler valve closed
2/24/2012	8:02:42 PM	Helium valve opened
2/24/2012	8:02:42 PM	Main Vac valve opened
2/24/2012	8:02:42 PM	Helium MFC set to  20.000000
2/24/2012	8:02:42 PM	H2 MFC set to  0.000000
2/24/2012	8:02:42 PM	BCl3 MFC set to  0.000000
2/24/2012	8:02:42 PM	PH3 MFC set to  0.000000
2/24/2012	8:02:42 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:02:42 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:02:42 PM	Tube furnace set to 0
2/24/2012	8:03:12 PM	Helium valve closed
2/24/2012	8:03:12 PM	H2 valve closed
2/24/2012	8:03:12 PM	BCl3 valve closed
2/24/2012	8:03:12 PM	PH3 valve closed
2/24/2012	8:03:12 PM	SiCl4 pre valve closed
2/24/2012	8:03:12 PM	SiCl4 post valve closed
2/24/2012	8:03:12 PM	Bypass valve closed
2/24/2012	8:03:12 PM	Bubbler valve closed
2/24/2012	8:03:12 PM	Main Vac valve opened
2/24/2012	8:03:12 PM	Helium MFC set to  0.000000
2/24/2012	8:03:12 PM	H2 MFC set to  0.000000
2/24/2012	8:03:12 PM	BCl3 MFC set to  0.000000
2/24/2012	8:03:12 PM	PH3 MFC set to  0.000000
2/24/2012	8:03:12 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:03:12 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:03:12 PM	Tube furnace set to 0
2/24/2012	8:03:42 PM	H2 valve closed
2/24/2012	8:03:42 PM	BCl3 valve closed
2/24/2012	8:03:42 PM	PH3 valve closed
2/24/2012	8:03:42 PM	SiCl4 pre valve closed
2/24/2012	8:03:42 PM	SiCl4 post valve closed
2/24/2012	8:03:42 PM	Bypass valve closed
2/24/2012	8:03:42 PM	Bubbler valve closed
2/24/2012	8:03:42 PM	Helium valve opened
2/24/2012	8:03:42 PM	Main Vac valve opened
2/24/2012	8:03:42 PM	Helium MFC set to  20.000000
2/24/2012	8:03:42 PM	H2 MFC set to  0.000000
2/24/2012	8:03:42 PM	BCl3 MFC set to  0.000000
2/24/2012	8:03:42 PM	PH3 MFC set to  0.000000
2/24/2012	8:03:42 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:03:42 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:03:42 PM	Tube furnace set to 0
2/24/2012	8:04:12 PM	Helium valve closed
2/24/2012	8:04:12 PM	H2 valve closed
2/24/2012	8:04:12 PM	BCl3 valve closed
2/24/2012	8:04:12 PM	PH3 valve closed
2/24/2012	8:04:12 PM	SiCl4 pre valve closed
2/24/2012	8:04:12 PM	SiCl4 post valve closed
2/24/2012	8:04:12 PM	Bypass valve closed
2/24/2012	8:04:12 PM	Bubbler valve closed
2/24/2012	8:04:12 PM	Main Vac valve opened
2/24/2012	8:04:12 PM	Helium MFC set to  0.000000
2/24/2012	8:04:12 PM	H2 MFC set to  0.000000
2/24/2012	8:04:12 PM	BCl3 MFC set to  0.000000
2/24/2012	8:04:12 PM	PH3 MFC set to  0.000000
2/24/2012	8:04:12 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:04:12 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:04:12 PM	Tube furnace set to 0
2/24/2012	8:04:42 PM	H2 valve closed
2/24/2012	8:04:42 PM	BCl3 valve closed
2/24/2012	8:04:42 PM	PH3 valve closed
2/24/2012	8:04:42 PM	SiCl4 pre valve closed
2/24/2012	8:04:42 PM	SiCl4 post valve closed
2/24/2012	8:04:42 PM	Bypass valve closed
2/24/2012	8:04:42 PM	Bubbler valve closed
2/24/2012	8:04:42 PM	Helium valve opened
2/24/2012	8:04:42 PM	Main Vac valve opened
2/24/2012	8:04:42 PM	Helium MFC set to  20.000000
2/24/2012	8:04:42 PM	H2 MFC set to  0.000000
2/24/2012	8:04:42 PM	BCl3 MFC set to  0.000000
2/24/2012	8:04:42 PM	PH3 MFC set to  0.000000
2/24/2012	8:04:42 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:04:42 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:04:43 PM	Tube furnace set to 0
2/24/2012	8:05:13 PM	Helium valve closed
2/24/2012	8:05:13 PM	H2 valve closed
2/24/2012	8:05:13 PM	BCl3 valve closed
2/24/2012	8:05:13 PM	PH3 valve closed
2/24/2012	8:05:13 PM	SiCl4 pre valve closed
2/24/2012	8:05:13 PM	SiCl4 post valve closed
2/24/2012	8:05:13 PM	Bypass valve closed
2/24/2012	8:05:13 PM	Bubbler valve closed
2/24/2012	8:05:13 PM	Main Vac valve opened
2/24/2012	8:05:13 PM	Helium MFC set to  0.000000
2/24/2012	8:05:13 PM	H2 MFC set to  0.000000
2/24/2012	8:05:13 PM	BCl3 MFC set to  0.000000
2/24/2012	8:05:13 PM	PH3 MFC set to  0.000000
2/24/2012	8:05:13 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:05:13 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:05:13 PM	Tube furnace set to 0
2/24/2012	8:05:43 PM	H2 valve closed
2/24/2012	8:05:43 PM	BCl3 valve closed
2/24/2012	8:05:43 PM	PH3 valve closed
2/24/2012	8:05:43 PM	SiCl4 pre valve closed
2/24/2012	8:05:43 PM	SiCl4 post valve closed
2/24/2012	8:05:43 PM	Bypass valve closed
2/24/2012	8:05:43 PM	Bubbler valve closed
2/24/2012	8:05:43 PM	Helium valve opened
2/24/2012	8:05:43 PM	Main Vac valve opened
2/24/2012	8:05:43 PM	Helium MFC set to  20.000000
2/24/2012	8:05:43 PM	H2 MFC set to  0.000000
2/24/2012	8:05:43 PM	BCl3 MFC set to  0.000000
2/24/2012	8:05:43 PM	PH3 MFC set to  0.000000
2/24/2012	8:05:43 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:05:43 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:05:43 PM	Tube furnace set to 0
2/24/2012	8:06:13 PM	Helium valve closed
2/24/2012	8:06:13 PM	H2 valve closed
2/24/2012	8:06:13 PM	BCl3 valve closed
2/24/2012	8:06:13 PM	PH3 valve closed
2/24/2012	8:06:13 PM	SiCl4 pre valve closed
2/24/2012	8:06:13 PM	SiCl4 post valve closed
2/24/2012	8:06:13 PM	Bypass valve closed
2/24/2012	8:06:13 PM	Bubbler valve closed
2/24/2012	8:06:13 PM	Main Vac valve opened
2/24/2012	8:06:13 PM	Helium MFC set to  0.000000
2/24/2012	8:06:13 PM	H2 MFC set to  0.000000
2/24/2012	8:06:13 PM	BCl3 MFC set to  0.000000
2/24/2012	8:06:13 PM	PH3 MFC set to  0.000000
2/24/2012	8:06:13 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:06:13 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:06:13 PM	Tube furnace set to 0
2/24/2012	8:06:43 PM	H2 valve closed
2/24/2012	8:06:43 PM	BCl3 valve closed
2/24/2012	8:06:43 PM	PH3 valve closed
2/24/2012	8:06:43 PM	SiCl4 pre valve closed
2/24/2012	8:06:43 PM	SiCl4 post valve closed
2/24/2012	8:06:43 PM	Bypass valve closed
2/24/2012	8:06:43 PM	Bubbler valve closed
2/24/2012	8:06:43 PM	Helium valve opened
2/24/2012	8:06:43 PM	Main Vac valve opened
2/24/2012	8:06:43 PM	Helium MFC set to  20.000000
2/24/2012	8:06:43 PM	H2 MFC set to  0.000000
2/24/2012	8:06:43 PM	BCl3 MFC set to  0.000000
2/24/2012	8:06:43 PM	PH3 MFC set to  0.000000
2/24/2012	8:06:43 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:06:43 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:06:43 PM	Tube furnace set to 0
2/24/2012	8:07:13 PM	Helium valve closed
2/24/2012	8:07:13 PM	H2 valve closed
2/24/2012	8:07:13 PM	BCl3 valve closed
2/24/2012	8:07:13 PM	PH3 valve closed
2/24/2012	8:07:13 PM	SiCl4 pre valve closed
2/24/2012	8:07:13 PM	SiCl4 post valve closed
2/24/2012	8:07:13 PM	Bypass valve closed
2/24/2012	8:07:13 PM	Bubbler valve closed
2/24/2012	8:07:13 PM	Main Vac valve opened
2/24/2012	8:07:13 PM	Helium MFC set to  0.000000
2/24/2012	8:07:13 PM	H2 MFC set to  0.000000
2/24/2012	8:07:13 PM	BCl3 MFC set to  0.000000
2/24/2012	8:07:13 PM	PH3 MFC set to  0.000000
2/24/2012	8:07:13 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:07:13 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:07:14 PM	Tube furnace set to 0
2/24/2012	8:07:44 PM	H2 valve closed
2/24/2012	8:07:44 PM	BCl3 valve closed
2/24/2012	8:07:44 PM	PH3 valve closed
2/24/2012	8:07:44 PM	SiCl4 pre valve closed
2/24/2012	8:07:44 PM	SiCl4 post valve closed
2/24/2012	8:07:44 PM	Bypass valve closed
2/24/2012	8:07:44 PM	Bubbler valve closed
2/24/2012	8:07:44 PM	Helium valve opened
2/24/2012	8:07:44 PM	Main Vac valve opened
2/24/2012	8:07:44 PM	Helium MFC set to  20.000000
2/24/2012	8:07:44 PM	H2 MFC set to  0.000000
2/24/2012	8:07:44 PM	BCl3 MFC set to  0.000000
2/24/2012	8:07:44 PM	PH3 MFC set to  0.000000
2/24/2012	8:07:44 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:07:44 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:07:44 PM	Tube furnace set to 0
2/24/2012	8:08:14 PM	Helium valve closed
2/24/2012	8:08:14 PM	H2 valve closed
2/24/2012	8:08:14 PM	BCl3 valve closed
2/24/2012	8:08:14 PM	PH3 valve closed
2/24/2012	8:08:14 PM	SiCl4 pre valve closed
2/24/2012	8:08:14 PM	SiCl4 post valve closed
2/24/2012	8:08:14 PM	Bypass valve closed
2/24/2012	8:08:14 PM	Bubbler valve closed
2/24/2012	8:08:14 PM	Main Vac valve opened
2/24/2012	8:08:14 PM	Helium MFC set to  0.000000
2/24/2012	8:08:14 PM	H2 MFC set to  0.000000
2/24/2012	8:08:14 PM	BCl3 MFC set to  0.000000
2/24/2012	8:08:14 PM	PH3 MFC set to  0.000000
2/24/2012	8:08:14 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:08:14 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:08:14 PM	Tube furnace set to 0
2/24/2012	8:08:44 PM	H2 valve closed
2/24/2012	8:08:44 PM	BCl3 valve closed
2/24/2012	8:08:44 PM	PH3 valve closed
2/24/2012	8:08:44 PM	SiCl4 pre valve closed
2/24/2012	8:08:44 PM	SiCl4 post valve closed
2/24/2012	8:08:44 PM	Bypass valve closed
2/24/2012	8:08:44 PM	Bubbler valve closed
2/24/2012	8:08:44 PM	Helium valve opened
2/24/2012	8:08:44 PM	Main Vac valve opened
2/24/2012	8:08:44 PM	Helium MFC set to  20.000000
2/24/2012	8:08:44 PM	H2 MFC set to  0.000000
2/24/2012	8:08:44 PM	BCl3 MFC set to  0.000000
2/24/2012	8:08:44 PM	PH3 MFC set to  0.000000
2/24/2012	8:08:44 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:08:44 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:08:44 PM	Tube furnace set to 0
2/24/2012	8:09:14 PM	Helium valve closed
2/24/2012	8:09:14 PM	H2 valve closed
2/24/2012	8:09:14 PM	BCl3 valve closed
2/24/2012	8:09:14 PM	PH3 valve closed
2/24/2012	8:09:14 PM	SiCl4 pre valve closed
2/24/2012	8:09:14 PM	SiCl4 post valve closed
2/24/2012	8:09:14 PM	Bypass valve closed
2/24/2012	8:09:14 PM	Bubbler valve closed
2/24/2012	8:09:14 PM	Main Vac valve opened
2/24/2012	8:09:14 PM	Helium MFC set to  0.000000
2/24/2012	8:09:14 PM	H2 MFC set to  0.000000
2/24/2012	8:09:14 PM	BCl3 MFC set to  0.000000
2/24/2012	8:09:14 PM	PH3 MFC set to  0.000000
2/24/2012	8:09:14 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:09:14 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:09:14 PM	Tube furnace set to 0
2/24/2012	8:09:15 PM	Run finished at 8:09 PM
2/24/2012	8:09:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/24/2012	8:41:50 PM	Main Vac valve closed
2/24/2012	8:42:10 PM	Main Vac valve opened
2/24/2012	8:42:48 PM	Recipe started at 8:42 PM
2/24/2012	8:42:48 PM	Helium valve closed
2/24/2012	8:42:48 PM	H2 valve closed
2/24/2012	8:42:48 PM	BCl3 valve closed
2/24/2012	8:42:48 PM	PH3 valve closed
2/24/2012	8:42:48 PM	SiCl4 pre valve closed
2/24/2012	8:42:48 PM	SiCl4 post valve closed
2/24/2012	8:42:48 PM	Main Vac valve closed
2/24/2012	8:42:48 PM	Bypass valve closed
2/24/2012	8:42:48 PM	Bubbler valve closed
2/24/2012	8:42:48 PM	Helium MFC set to  0.000000
2/24/2012	8:42:48 PM	H2 MFC set to  0.000000
2/24/2012	8:42:48 PM	BCl3 MFC set to  0.000000
2/24/2012	8:42:48 PM	PH3 MFC set to  0.000000
2/24/2012	8:42:48 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:42:48 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:42:49 PM	Tube furnace set to 0
2/24/2012	8:42:52 PM	Helium valve closed
2/24/2012	8:42:52 PM	BCl3 valve closed
2/24/2012	8:42:52 PM	PH3 valve closed
2/24/2012	8:42:52 PM	SiCl4 pre valve closed
2/24/2012	8:42:52 PM	SiCl4 post valve closed
2/24/2012	8:42:52 PM	Main Vac valve closed
2/24/2012	8:42:52 PM	Bypass valve closed
2/24/2012	8:42:52 PM	Bubbler valve closed
2/24/2012	8:42:52 PM	H2 valve opened
2/24/2012	8:42:52 PM	Helium MFC set to  0.000000
2/24/2012	8:42:52 PM	H2 MFC set to  500.000000
2/24/2012	8:42:52 PM	BCl3 MFC set to  0.000000
2/24/2012	8:42:52 PM	PH3 MFC set to  0.000000
2/24/2012	8:42:52 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:42:52 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:42:52 PM	Tube furnace set to 0
2/24/2012	8:43:59 PM	Helium valve closed
2/24/2012	8:43:59 PM	BCl3 valve closed
2/24/2012	8:43:59 PM	PH3 valve closed
2/24/2012	8:43:59 PM	SiCl4 pre valve closed
2/24/2012	8:43:59 PM	SiCl4 post valve closed
2/24/2012	8:43:59 PM	Main Vac valve closed
2/24/2012	8:43:59 PM	Bypass valve closed
2/24/2012	8:43:59 PM	H2 valve opened
2/24/2012	8:43:59 PM	Bubbler valve opened
2/24/2012	8:43:59 PM	Helium MFC set to  0.000000
2/24/2012	8:43:59 PM	H2 MFC set to  500.000000
2/24/2012	8:43:59 PM	BCl3 MFC set to  0.000000
2/24/2012	8:43:59 PM	PH3 MFC set to  0.000000
2/24/2012	8:43:59 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:43:59 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:43:59 PM	Tube furnace set to 0
2/24/2012	8:44:00 PM	Helium valve closed
2/24/2012	8:44:00 PM	BCl3 valve closed
2/24/2012	8:44:00 PM	PH3 valve closed
2/24/2012	8:44:00 PM	SiCl4 pre valve closed
2/24/2012	8:44:00 PM	SiCl4 post valve closed
2/24/2012	8:44:00 PM	Main Vac valve closed
2/24/2012	8:44:00 PM	Bypass valve closed
2/24/2012	8:44:00 PM	H2 valve opened
2/24/2012	8:44:00 PM	Bubbler valve opened
2/24/2012	8:44:00 PM	Helium MFC set to  0.000000
2/24/2012	8:44:00 PM	H2 MFC set to  500.000000
2/24/2012	8:44:00 PM	BCl3 MFC set to  0.000000
2/24/2012	8:44:00 PM	PH3 MFC set to  0.000000
2/24/2012	8:44:00 PM	SiCl4 MFC set to  0.000000
2/24/2012	8:44:00 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	8:44:00 PM	Tube furnace set to 1000
2/24/2012	9:04:00 PM	Helium valve closed
2/24/2012	9:04:00 PM	BCl3 valve closed
2/24/2012	9:04:00 PM	Main Vac valve closed
2/24/2012	9:04:00 PM	Bypass valve closed
2/24/2012	9:04:00 PM	H2 valve opened
2/24/2012	9:04:00 PM	PH3 valve opened
2/24/2012	9:04:00 PM	SiCl4 pre valve opened
2/24/2012	9:04:00 PM	SiCl4 post valve opened
2/24/2012	9:04:00 PM	Bubbler valve opened
2/24/2012	9:04:00 PM	Helium MFC set to  0.000000
2/24/2012	9:04:00 PM	H2 MFC set to  500.000000
2/24/2012	9:04:00 PM	BCl3 MFC set to  0.000000
2/24/2012	9:04:00 PM	PH3 MFC set to  0.300000
2/24/2012	9:04:00 PM	SiCl4 MFC set to  25.000000
2/24/2012	9:04:00 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	9:04:01 PM	Tube furnace set to 1000
2/24/2012	9:13:01 PM	Helium valve closed
2/24/2012	9:13:01 PM	BCl3 valve closed
2/24/2012	9:13:01 PM	PH3 valve closed
2/24/2012	9:13:01 PM	SiCl4 pre valve closed
2/24/2012	9:13:01 PM	SiCl4 post valve closed
2/24/2012	9:13:01 PM	Main Vac valve closed
2/24/2012	9:13:01 PM	Bypass valve closed
2/24/2012	9:13:01 PM	H2 valve opened
2/24/2012	9:13:01 PM	Bubbler valve opened
2/24/2012	9:13:01 PM	Helium MFC set to  0.000000
2/24/2012	9:13:01 PM	H2 MFC set to  500.000000
2/24/2012	9:13:01 PM	BCl3 MFC set to  0.000000
2/24/2012	9:13:01 PM	PH3 MFC set to  0.000000
2/24/2012	9:13:01 PM	SiCl4 MFC set to  0.000000
2/24/2012	9:13:01 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	9:13:01 PM	Tube furnace set to 750
2/24/2012	9:18:01 PM	H2 valve closed
2/24/2012	9:18:01 PM	BCl3 valve closed
2/24/2012	9:18:01 PM	PH3 valve closed
2/24/2012	9:18:01 PM	SiCl4 pre valve closed
2/24/2012	9:18:01 PM	SiCl4 post valve closed
2/24/2012	9:18:01 PM	Main Vac valve closed
2/24/2012	9:18:01 PM	Bypass valve closed
2/24/2012	9:18:01 PM	Helium valve opened
2/24/2012	9:18:01 PM	Bubbler valve opened
2/24/2012	9:18:01 PM	Helium MFC set to  500.000000
2/24/2012	9:18:01 PM	H2 MFC set to  0.000000
2/24/2012	9:18:01 PM	BCl3 MFC set to  0.000000
2/24/2012	9:18:01 PM	PH3 MFC set to  0.000000
2/24/2012	9:18:01 PM	SiCl4 MFC set to  0.000000
2/24/2012	9:18:01 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	9:18:01 PM	Tube furnace set to 0
2/24/2012	9:38:01 PM	Helium valve closed
2/24/2012	9:38:01 PM	H2 valve closed
2/24/2012	9:38:01 PM	BCl3 valve closed
2/24/2012	9:38:01 PM	PH3 valve closed
2/24/2012	9:38:01 PM	SiCl4 pre valve closed
2/24/2012	9:38:01 PM	SiCl4 post valve closed
2/24/2012	9:38:01 PM	Main Vac valve closed
2/24/2012	9:38:01 PM	Bypass valve closed
2/24/2012	9:38:01 PM	Bubbler valve closed
2/24/2012	9:38:01 PM	Helium MFC set to  0.000000
2/24/2012	9:38:01 PM	H2 MFC set to  0.000000
2/24/2012	9:38:01 PM	BCl3 MFC set to  0.000000
2/24/2012	9:38:01 PM	PH3 MFC set to  0.000000
2/24/2012	9:38:01 PM	SiCl4 MFC set to  0.000000
2/24/2012	9:38:01 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	9:38:01 PM	Tube furnace set to 0
2/24/2012	9:38:02 PM	Run finished at 9:38 PM
2/24/2012	10:02:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	10:03:00 PM	Recipe started at 10:03 PM
2/24/2012	10:03:00 PM	Helium valve closed
2/24/2012	10:03:00 PM	H2 valve closed
2/24/2012	10:03:00 PM	BCl3 valve closed
2/24/2012	10:03:00 PM	PH3 valve closed
2/24/2012	10:03:00 PM	SiCl4 pre valve closed
2/24/2012	10:03:00 PM	SiCl4 post valve closed
2/24/2012	10:03:00 PM	Main Vac valve closed
2/24/2012	10:03:00 PM	Bypass valve closed
2/24/2012	10:03:00 PM	Bubbler valve closed
2/24/2012	10:03:00 PM	Helium MFC set to  0.000000
2/24/2012	10:03:00 PM	H2 MFC set to  0.000000
2/24/2012	10:03:00 PM	BCl3 MFC set to  0.000000
2/24/2012	10:03:00 PM	PH3 MFC set to  0.000000
2/24/2012	10:03:00 PM	SiCl4 MFC set to  0.000000
2/24/2012	10:03:00 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:03:00 PM	Tube furnace set to 0
2/24/2012	10:03:04 PM	H2 valve closed
2/24/2012	10:03:04 PM	BCl3 valve closed
2/24/2012	10:03:04 PM	PH3 valve closed
2/24/2012	10:03:04 PM	SiCl4 pre valve closed
2/24/2012	10:03:04 PM	SiCl4 post valve closed
2/24/2012	10:03:04 PM	Main Vac valve closed
2/24/2012	10:03:04 PM	Bypass valve closed
2/24/2012	10:03:04 PM	Bubbler valve closed
2/24/2012	10:03:04 PM	Helium valve opened
2/24/2012	10:03:04 PM	Helium MFC set to  500.000000
2/24/2012	10:03:04 PM	H2 MFC set to  0.000000
2/24/2012	10:03:04 PM	BCl3 MFC set to  0.000000
2/24/2012	10:03:04 PM	PH3 MFC set to  0.000000
2/24/2012	10:03:04 PM	SiCl4 MFC set to  0.000000
2/24/2012	10:03:04 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:03:04 PM	Tube furnace set to 0
2/24/2012	10:03:06 PM	Helium valve closed
2/24/2012	10:03:06 PM	H2 valve closed
2/24/2012	10:03:06 PM	BCl3 valve closed
2/24/2012	10:03:06 PM	PH3 valve closed
2/24/2012	10:03:06 PM	SiCl4 pre valve closed
2/24/2012	10:03:06 PM	SiCl4 post valve closed
2/24/2012	10:03:06 PM	Main Vac valve closed
2/24/2012	10:03:06 PM	Bypass valve closed
2/24/2012	10:03:06 PM	Bubbler valve closed
2/24/2012	10:03:06 PM	Helium MFC set to  0.000000
2/24/2012	10:03:06 PM	H2 MFC set to  0.000000
2/24/2012	10:03:06 PM	BCl3 MFC set to  0.000000
2/24/2012	10:03:06 PM	PH3 MFC set to  0.000000
2/24/2012	10:03:06 PM	SiCl4 MFC set to  0.000000
2/24/2012	10:03:06 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:03:07 PM	Tube furnace set to 0
2/24/2012	10:03:08 PM	Run finished at 10:03 PM
2/24/2012	10:03:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/24/2012	10:05:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/24/2012	10:05:17 PM	Recipe started at 10:05 PM
2/24/2012	10:05:17 PM	Helium valve closed
2/24/2012	10:05:17 PM	H2 valve closed
2/24/2012	10:05:17 PM	BCl3 valve closed
2/24/2012	10:05:17 PM	PH3 valve closed
2/24/2012	10:05:17 PM	SiCl4 pre valve closed
2/24/2012	10:05:17 PM	SiCl4 post valve closed
2/24/2012	10:05:17 PM	Main Vac valve closed
2/24/2012	10:05:17 PM	Bubbler valve closed
2/24/2012	10:05:17 PM	Bypass valve opened
2/24/2012	10:05:17 PM	Helium MFC set to  0.000000
2/24/2012	10:05:17 PM	H2 MFC set to  0.000000
2/24/2012	10:05:17 PM	BCl3 MFC set to  0.000000
2/24/2012	10:05:17 PM	PH3 MFC set to  0.000000
2/24/2012	10:05:17 PM	SiCl4 MFC set to  0.000000
2/24/2012	10:05:17 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:05:17 PM	Tube furnace set to 0
2/24/2012	10:06:18 PM	Helium valve closed
2/24/2012	10:06:18 PM	H2 valve closed
2/24/2012	10:06:18 PM	BCl3 valve closed
2/24/2012	10:06:18 PM	PH3 valve closed
2/24/2012	10:06:18 PM	SiCl4 pre valve closed
2/24/2012	10:06:18 PM	SiCl4 post valve closed
2/24/2012	10:06:18 PM	Main Vac valve closed
2/24/2012	10:06:18 PM	Bubbler valve closed
2/24/2012	10:06:18 PM	Bypass valve opened
2/24/2012	10:06:18 PM	Helium MFC set to  0.000000
2/24/2012	10:06:18 PM	H2 MFC set to  0.000000
2/24/2012	10:06:18 PM	BCl3 MFC set to  0.000000
2/24/2012	10:06:18 PM	PH3 MFC set to  0.000000
2/24/2012	10:06:18 PM	SiCl4 MFC set to  0.000000
2/24/2012	10:06:18 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:06:18 PM	Tube furnace set to 0
2/24/2012	10:07:18 PM	Helium valve closed
2/24/2012	10:07:18 PM	H2 valve closed
2/24/2012	10:07:18 PM	BCl3 valve closed
2/24/2012	10:07:18 PM	PH3 valve closed
2/24/2012	10:07:18 PM	SiCl4 pre valve closed
2/24/2012	10:07:18 PM	SiCl4 post valve closed
2/24/2012	10:07:18 PM	Bypass valve closed
2/24/2012	10:07:18 PM	Bubbler valve closed
2/24/2012	10:07:18 PM	Main Vac valve opened
2/24/2012	10:07:18 PM	Helium MFC set to  0.000000
2/24/2012	10:07:18 PM	H2 MFC set to  0.000000
2/24/2012	10:07:18 PM	BCl3 MFC set to  0.000000
2/24/2012	10:07:18 PM	PH3 MFC set to  0.000000
2/24/2012	10:07:18 PM	SiCl4 MFC set to  0.000000
2/24/2012	10:07:18 PM	Bypass solenoid MFC set to  0.000000
2/24/2012	10:07:18 PM	Tube furnace set to 0
2/24/2012	10:07:19 PM	Run finished at 10:07 PM
2/24/2012	10:07:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
